9/10/2011	12:18:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2011	12:18:12 AM	Recipe started at 12:18 AM
9/10/2011	12:18:12 AM	Helium valve closed
9/10/2011	12:18:13 AM	H2 valve closed
9/10/2011	12:18:13 AM	BCl3 valve closed
9/10/2011	12:18:13 AM	PH3 valve closed
9/10/2011	12:18:13 AM	SiCl4 pre valve closed
9/10/2011	12:18:13 AM	SiCl4 post valve closed
9/10/2011	12:18:13 AM	Main Vac valve closed
9/10/2011	12:18:13 AM	Bypass valve closed
9/10/2011	12:18:13 AM	Bubbler valve closed
9/10/2011	12:18:13 AM	Helium MFC set to  0.000000
9/10/2011	12:18:13 AM	H2 MFC set to  0.000000
9/10/2011	12:18:13 AM	BCl3 MFC set to  0.000000
9/10/2011	12:18:13 AM	PHl3 MFC set to  0.000000
9/10/2011	12:18:13 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:18:13 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:18:13 AM	Tube furnace set to 0
9/10/2011	12:18:16 AM	H2 valve closed
9/10/2011	12:18:16 AM	BCl3 valve closed
9/10/2011	12:18:16 AM	PH3 valve closed
9/10/2011	12:18:16 AM	SiCl4 pre valve closed
9/10/2011	12:18:16 AM	SiCl4 post valve closed
9/10/2011	12:18:16 AM	Main Vac valve closed
9/10/2011	12:18:16 AM	Bypass valve closed
9/10/2011	12:18:16 AM	Bubbler valve closed
9/10/2011	12:18:16 AM	Helium valve opened
9/10/2011	12:18:16 AM	Helium MFC set to  500.000000
9/10/2011	12:18:16 AM	H2 MFC set to  0.000000
9/10/2011	12:18:16 AM	BCl3 MFC set to  0.000000
9/10/2011	12:18:16 AM	PHl3 MFC set to  0.000000
9/10/2011	12:18:16 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:18:16 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:18:16 AM	Tube furnace set to 0
9/10/2011	12:19:18 AM	Helium valve closed
9/10/2011	12:19:18 AM	H2 valve closed
9/10/2011	12:19:18 AM	BCl3 valve closed
9/10/2011	12:19:18 AM	PH3 valve closed
9/10/2011	12:19:18 AM	SiCl4 pre valve closed
9/10/2011	12:19:18 AM	SiCl4 post valve closed
9/10/2011	12:19:18 AM	Main Vac valve closed
9/10/2011	12:19:18 AM	Bypass valve closed
9/10/2011	12:19:18 AM	Bubbler valve closed
9/10/2011	12:19:18 AM	Helium MFC set to  0.000000
9/10/2011	12:19:18 AM	H2 MFC set to  0.000000
9/10/2011	12:19:18 AM	BCl3 MFC set to  0.000000
9/10/2011	12:19:18 AM	PHl3 MFC set to  0.000000
9/10/2011	12:19:18 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:19:18 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:19:18 AM	Tube furnace set to 0
9/10/2011	12:19:19 AM	Run finished at 12:19 AM
9/10/2011	12:19:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2011	12:21:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/10/2011	12:22:09 AM	Recipe started at 12:22 AM
9/10/2011	12:22:09 AM	Helium valve closed
9/10/2011	12:22:09 AM	H2 valve closed
9/10/2011	12:22:09 AM	BCl3 valve closed
9/10/2011	12:22:09 AM	PH3 valve closed
9/10/2011	12:22:09 AM	SiCl4 pre valve closed
9/10/2011	12:22:09 AM	SiCl4 post valve closed
9/10/2011	12:22:09 AM	Main Vac valve closed
9/10/2011	12:22:09 AM	Bubbler valve closed
9/10/2011	12:22:09 AM	Bypass valve opened
9/10/2011	12:22:09 AM	Helium MFC set to  0.000000
9/10/2011	12:22:10 AM	H2 MFC set to  0.000000
9/10/2011	12:22:10 AM	BCl3 MFC set to  0.000000
9/10/2011	12:22:10 AM	PHl3 MFC set to  0.000000
9/10/2011	12:22:10 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:22:10 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:22:10 AM	Tube furnace set to 0
9/10/2011	12:23:12 AM	Helium valve closed
9/10/2011	12:23:12 AM	H2 valve closed
9/10/2011	12:23:12 AM	BCl3 valve closed
9/10/2011	12:23:12 AM	PH3 valve closed
9/10/2011	12:23:12 AM	SiCl4 pre valve closed
9/10/2011	12:23:12 AM	SiCl4 post valve closed
9/10/2011	12:23:12 AM	Main Vac valve closed
9/10/2011	12:23:12 AM	Bubbler valve closed
9/10/2011	12:23:12 AM	Bypass valve opened
9/10/2011	12:23:12 AM	Helium MFC set to  0.000000
9/10/2011	12:23:12 AM	H2 MFC set to  0.000000
9/10/2011	12:23:12 AM	BCl3 MFC set to  0.000000
9/10/2011	12:23:12 AM	PHl3 MFC set to  0.000000
9/10/2011	12:23:12 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:23:12 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:23:12 AM	Tube furnace set to 0
9/10/2011	12:23:42 AM	Helium valve closed
9/10/2011	12:23:42 AM	H2 valve closed
9/10/2011	12:23:42 AM	BCl3 valve closed
9/10/2011	12:23:42 AM	PH3 valve closed
9/10/2011	12:23:42 AM	SiCl4 pre valve closed
9/10/2011	12:23:42 AM	SiCl4 post valve closed
9/10/2011	12:23:42 AM	Bypass valve closed
9/10/2011	12:23:42 AM	Bubbler valve closed
9/10/2011	12:23:42 AM	Main Vac valve opened
9/10/2011	12:23:42 AM	Helium MFC set to  0.000000
9/10/2011	12:23:42 AM	H2 MFC set to  0.000000
9/10/2011	12:23:42 AM	BCl3 MFC set to  0.000000
9/10/2011	12:23:42 AM	PHl3 MFC set to  0.000000
9/10/2011	12:23:42 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:23:42 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:23:42 AM	Tube furnace set to 0
9/10/2011	12:24:12 AM	H2 valve closed
9/10/2011	12:24:12 AM	BCl3 valve closed
9/10/2011	12:24:12 AM	PH3 valve closed
9/10/2011	12:24:12 AM	SiCl4 pre valve closed
9/10/2011	12:24:12 AM	SiCl4 post valve closed
9/10/2011	12:24:12 AM	Bypass valve closed
9/10/2011	12:24:12 AM	Bubbler valve closed
9/10/2011	12:24:12 AM	Helium valve opened
9/10/2011	12:24:12 AM	Main Vac valve opened
9/10/2011	12:24:12 AM	Helium MFC set to  20.000000
9/10/2011	12:24:12 AM	H2 MFC set to  0.000000
9/10/2011	12:24:12 AM	BCl3 MFC set to  0.000000
9/10/2011	12:24:12 AM	PHl3 MFC set to  0.000000
9/10/2011	12:24:12 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:24:12 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:24:12 AM	Tube furnace set to 0
9/10/2011	12:24:43 AM	Helium valve closed
9/10/2011	12:24:43 AM	H2 valve closed
9/10/2011	12:24:43 AM	BCl3 valve closed
9/10/2011	12:24:43 AM	PH3 valve closed
9/10/2011	12:24:43 AM	SiCl4 pre valve closed
9/10/2011	12:24:43 AM	SiCl4 post valve closed
9/10/2011	12:24:43 AM	Bypass valve closed
9/10/2011	12:24:43 AM	Bubbler valve closed
9/10/2011	12:24:43 AM	Main Vac valve opened
9/10/2011	12:24:43 AM	Helium MFC set to  0.000000
9/10/2011	12:24:43 AM	H2 MFC set to  0.000000
9/10/2011	12:24:43 AM	BCl3 MFC set to  0.000000
9/10/2011	12:24:43 AM	PHl3 MFC set to  0.000000
9/10/2011	12:24:43 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:24:43 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:24:43 AM	Tube furnace set to 0
9/10/2011	12:25:13 AM	H2 valve closed
9/10/2011	12:25:13 AM	BCl3 valve closed
9/10/2011	12:25:13 AM	PH3 valve closed
9/10/2011	12:25:13 AM	SiCl4 pre valve closed
9/10/2011	12:25:13 AM	SiCl4 post valve closed
9/10/2011	12:25:13 AM	Bypass valve closed
9/10/2011	12:25:13 AM	Bubbler valve closed
9/10/2011	12:25:13 AM	Helium valve opened
9/10/2011	12:25:13 AM	Main Vac valve opened
9/10/2011	12:25:13 AM	Helium MFC set to  20.000000
9/10/2011	12:25:13 AM	H2 MFC set to  0.000000
9/10/2011	12:25:13 AM	BCl3 MFC set to  0.000000
9/10/2011	12:25:13 AM	PHl3 MFC set to  0.000000
9/10/2011	12:25:13 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:25:13 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:25:13 AM	Tube furnace set to 0
9/10/2011	12:25:43 AM	Helium valve closed
9/10/2011	12:25:43 AM	H2 valve closed
9/10/2011	12:25:43 AM	BCl3 valve closed
9/10/2011	12:25:43 AM	PH3 valve closed
9/10/2011	12:25:43 AM	SiCl4 pre valve closed
9/10/2011	12:25:43 AM	SiCl4 post valve closed
9/10/2011	12:25:43 AM	Bypass valve closed
9/10/2011	12:25:43 AM	Bubbler valve closed
9/10/2011	12:25:43 AM	Main Vac valve opened
9/10/2011	12:25:43 AM	Helium MFC set to  0.000000
9/10/2011	12:25:43 AM	H2 MFC set to  0.000000
9/10/2011	12:25:43 AM	BCl3 MFC set to  0.000000
9/10/2011	12:25:43 AM	PHl3 MFC set to  0.000000
9/10/2011	12:25:43 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:25:43 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:25:43 AM	Tube furnace set to 0
9/10/2011	12:26:13 AM	H2 valve closed
9/10/2011	12:26:13 AM	BCl3 valve closed
9/10/2011	12:26:13 AM	PH3 valve closed
9/10/2011	12:26:13 AM	SiCl4 pre valve closed
9/10/2011	12:26:13 AM	SiCl4 post valve closed
9/10/2011	12:26:13 AM	Bypass valve closed
9/10/2011	12:26:13 AM	Bubbler valve closed
9/10/2011	12:26:13 AM	Helium valve opened
9/10/2011	12:26:13 AM	Main Vac valve opened
9/10/2011	12:26:13 AM	Helium MFC set to  20.000000
9/10/2011	12:26:13 AM	H2 MFC set to  0.000000
9/10/2011	12:26:13 AM	BCl3 MFC set to  0.000000
9/10/2011	12:26:13 AM	PHl3 MFC set to  0.000000
9/10/2011	12:26:13 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:26:13 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:26:13 AM	Tube furnace set to 0
9/10/2011	12:26:43 AM	Helium valve closed
9/10/2011	12:26:43 AM	H2 valve closed
9/10/2011	12:26:43 AM	BCl3 valve closed
9/10/2011	12:26:43 AM	PH3 valve closed
9/10/2011	12:26:43 AM	SiCl4 pre valve closed
9/10/2011	12:26:43 AM	SiCl4 post valve closed
9/10/2011	12:26:43 AM	Bypass valve closed
9/10/2011	12:26:43 AM	Bubbler valve closed
9/10/2011	12:26:43 AM	Main Vac valve opened
9/10/2011	12:26:43 AM	Helium MFC set to  0.000000
9/10/2011	12:26:43 AM	H2 MFC set to  0.000000
9/10/2011	12:26:43 AM	BCl3 MFC set to  0.000000
9/10/2011	12:26:43 AM	PHl3 MFC set to  0.000000
9/10/2011	12:26:43 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:26:43 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:26:43 AM	Tube furnace set to 0
9/10/2011	12:27:14 AM	H2 valve closed
9/10/2011	12:27:14 AM	BCl3 valve closed
9/10/2011	12:27:14 AM	PH3 valve closed
9/10/2011	12:27:14 AM	SiCl4 pre valve closed
9/10/2011	12:27:14 AM	SiCl4 post valve closed
9/10/2011	12:27:14 AM	Bypass valve closed
9/10/2011	12:27:14 AM	Bubbler valve closed
9/10/2011	12:27:14 AM	Helium valve opened
9/10/2011	12:27:14 AM	Main Vac valve opened
9/10/2011	12:27:14 AM	Helium MFC set to  20.000000
9/10/2011	12:27:14 AM	H2 MFC set to  0.000000
9/10/2011	12:27:14 AM	BCl3 MFC set to  0.000000
9/10/2011	12:27:14 AM	PHl3 MFC set to  0.000000
9/10/2011	12:27:14 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:27:14 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:27:14 AM	Tube furnace set to 0
9/10/2011	12:27:28 AM	Run aborted at 12:27 AM
9/10/2011	12:27:28 AM	Helium valve closed
9/10/2011	12:27:28 AM	H2 valve closed
9/10/2011	12:27:28 AM	BCl3 valve closed
9/10/2011	12:27:28 AM	PH3 valve closed
9/10/2011	12:27:28 AM	SiCl4 pre valve closed
9/10/2011	12:27:28 AM	SiCl4 post valve closed
9/10/2011	12:27:28 AM	Bypass valve closed
9/10/2011	12:27:28 AM	Main Vac valve closed
9/10/2011	12:27:28 AM	Bubbler valve closed
9/10/2011	12:27:28 AM	Helium MFC set to  0.000000
9/10/2011	12:27:28 AM	H2 MFC set to  0.000000
9/10/2011	12:27:28 AM	BCl3 MFC set to  0.000000
9/10/2011	12:27:28 AM	PHl3 MFC set to  0.000000
9/10/2011	12:27:28 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:27:28 AM	Tube furnace set to 0
9/10/2011	12:27:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/10/2011	12:27:32 AM	Main Vac valve opened
9/10/2011	12:29:52 AM	Recipe started at 12:29 AM
9/10/2011	12:29:52 AM	Helium valve closed
9/10/2011	12:29:52 AM	H2 valve closed
9/10/2011	12:29:52 AM	BCl3 valve closed
9/10/2011	12:29:52 AM	PH3 valve closed
9/10/2011	12:29:52 AM	SiCl4 pre valve closed
9/10/2011	12:29:52 AM	SiCl4 post valve closed
9/10/2011	12:29:52 AM	Bypass valve closed
9/10/2011	12:29:52 AM	Bubbler valve closed
9/10/2011	12:29:52 AM	Main Vac valve opened
9/10/2011	12:29:52 AM	Helium MFC set to  0.000000
9/10/2011	12:29:52 AM	H2 MFC set to  0.000000
9/10/2011	12:29:52 AM	BCl3 MFC set to  0.000000
9/10/2011	12:29:52 AM	PHl3 MFC set to  0.000000
9/10/2011	12:29:52 AM	SiCl4 MFC set to  0.000000
9/10/2011	12:29:52 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:29:52 AM	Tube furnace set to 180
9/10/2011	1:29:52 AM	H2 valve closed
9/10/2011	1:29:52 AM	BCl3 valve closed
9/10/2011	1:29:52 AM	PH3 valve closed
9/10/2011	1:29:52 AM	SiCl4 pre valve closed
9/10/2011	1:29:52 AM	SiCl4 post valve closed
9/10/2011	1:29:52 AM	Bypass valve closed
9/10/2011	1:29:52 AM	Bubbler valve closed
9/10/2011	1:29:52 AM	Helium valve opened
9/10/2011	1:29:52 AM	Main Vac valve opened
9/10/2011	1:29:52 AM	Helium MFC set to  10.000000
9/10/2011	1:29:52 AM	H2 MFC set to  0.000000
9/10/2011	1:29:52 AM	BCl3 MFC set to  0.000000
9/10/2011	1:29:52 AM	PHl3 MFC set to  0.000000
9/10/2011	1:29:52 AM	SiCl4 MFC set to  0.000000
9/10/2011	1:29:52 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	1:29:52 AM	Tube furnace set to 180
9/10/2011	1:30:22 AM	Helium valve closed
9/10/2011	1:30:22 AM	H2 valve closed
9/10/2011	1:30:22 AM	BCl3 valve closed
9/10/2011	1:30:22 AM	PH3 valve closed
9/10/2011	1:30:22 AM	SiCl4 pre valve closed
9/10/2011	1:30:22 AM	SiCl4 post valve closed
9/10/2011	1:30:22 AM	Bypass valve closed
9/10/2011	1:30:22 AM	Bubbler valve closed
9/10/2011	1:30:22 AM	Main Vac valve opened
9/10/2011	1:30:22 AM	Helium MFC set to  0.000000
9/10/2011	1:30:22 AM	H2 MFC set to  0.000000
9/10/2011	1:30:22 AM	BCl3 MFC set to  0.000000
9/10/2011	1:30:22 AM	PHl3 MFC set to  0.000000
9/10/2011	1:30:22 AM	SiCl4 MFC set to  0.000000
9/10/2011	1:30:22 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	1:30:22 AM	Tube furnace set to 180
9/10/2011	1:30:52 AM	H2 valve closed
9/10/2011	1:30:52 AM	BCl3 valve closed
9/10/2011	1:30:52 AM	PH3 valve closed
9/10/2011	1:30:52 AM	SiCl4 pre valve closed
9/10/2011	1:30:52 AM	SiCl4 post valve closed
9/10/2011	1:30:52 AM	Bypass valve closed
9/10/2011	1:30:52 AM	Bubbler valve closed
9/10/2011	1:30:52 AM	Helium valve opened
9/10/2011	1:30:52 AM	Main Vac valve opened
9/10/2011	1:30:52 AM	Helium MFC set to  10.000000
9/10/2011	1:30:52 AM	H2 MFC set to  0.000000
9/10/2011	1:30:53 AM	BCl3 MFC set to  0.000000
9/10/2011	1:30:53 AM	PHl3 MFC set to  0.000000
9/10/2011	1:30:53 AM	SiCl4 MFC set to  0.000000
9/10/2011	1:30:53 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	1:30:53 AM	Tube furnace set to 180
9/10/2011	1:31:23 AM	Helium valve closed
9/10/2011	1:31:23 AM	H2 valve closed
9/10/2011	1:31:23 AM	BCl3 valve closed
9/10/2011	1:31:23 AM	PH3 valve closed
9/10/2011	1:31:23 AM	SiCl4 pre valve closed
9/10/2011	1:31:23 AM	SiCl4 post valve closed
9/10/2011	1:31:23 AM	Bypass valve closed
9/10/2011	1:31:23 AM	Bubbler valve closed
9/10/2011	1:31:23 AM	Main Vac valve opened
9/10/2011	1:31:23 AM	Helium MFC set to  0.000000
9/10/2011	1:31:23 AM	H2 MFC set to  0.000000
9/10/2011	1:31:23 AM	BCl3 MFC set to  0.000000
9/10/2011	1:31:23 AM	PHl3 MFC set to  0.000000
9/10/2011	1:31:23 AM	SiCl4 MFC set to  0.000000
9/10/2011	1:31:23 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	1:31:23 AM	Tube furnace set to 180
9/10/2011	1:32:23 AM	Helium valve closed
9/10/2011	1:32:23 AM	BCl3 valve closed
9/10/2011	1:32:23 AM	PH3 valve closed
9/10/2011	1:32:23 AM	SiCl4 pre valve closed
9/10/2011	1:32:23 AM	SiCl4 post valve closed
9/10/2011	1:32:23 AM	Main Vac valve closed
9/10/2011	1:32:23 AM	Bypass valve closed
9/10/2011	1:32:23 AM	Bubbler valve closed
9/10/2011	1:32:23 AM	H2 valve opened
9/10/2011	1:32:23 AM	Helium MFC set to  0.000000
9/10/2011	1:32:23 AM	H2 MFC set to  500.000000
9/10/2011	1:32:23 AM	BCl3 MFC set to  0.000000
9/10/2011	1:32:23 AM	PHl3 MFC set to  0.000000
9/10/2011	1:32:23 AM	SiCl4 MFC set to  0.000000
9/10/2011	1:32:23 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	1:32:23 AM	Tube furnace set to 1000
9/10/2011	1:33:27 AM	Helium valve closed
9/10/2011	1:33:27 AM	BCl3 valve closed
9/10/2011	1:33:27 AM	PH3 valve closed
9/10/2011	1:33:27 AM	SiCl4 pre valve closed
9/10/2011	1:33:27 AM	SiCl4 post valve closed
9/10/2011	1:33:27 AM	Main Vac valve closed
9/10/2011	1:33:27 AM	Bypass valve closed
9/10/2011	1:33:27 AM	H2 valve opened
9/10/2011	1:33:27 AM	Bubbler valve opened
9/10/2011	1:33:27 AM	Helium MFC set to  0.000000
9/10/2011	1:33:27 AM	H2 MFC set to  500.000000
9/10/2011	1:33:27 AM	BCl3 MFC set to  0.000000
9/10/2011	1:33:27 AM	PHl3 MFC set to  0.000000
9/10/2011	1:33:27 AM	SiCl4 MFC set to  0.000000
9/10/2011	1:33:27 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	1:33:27 AM	Tube furnace set to 1000
9/10/2011	1:33:28 AM	Helium valve closed
9/10/2011	1:33:28 AM	BCl3 valve closed
9/10/2011	1:33:28 AM	PH3 valve closed
9/10/2011	1:33:28 AM	SiCl4 pre valve closed
9/10/2011	1:33:28 AM	SiCl4 post valve closed
9/10/2011	1:33:28 AM	Main Vac valve closed
9/10/2011	1:33:28 AM	Bypass valve closed
9/10/2011	1:33:28 AM	H2 valve opened
9/10/2011	1:33:28 AM	Bubbler valve opened
9/10/2011	1:33:28 AM	Helium MFC set to  0.000000
9/10/2011	1:33:28 AM	H2 MFC set to  500.000000
9/10/2011	1:33:28 AM	BCl3 MFC set to  0.000000
9/10/2011	1:33:28 AM	PHl3 MFC set to  0.000000
9/10/2011	1:33:28 AM	SiCl4 MFC set to  0.000000
9/10/2011	1:33:28 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	1:33:28 AM	Tube furnace set to 1000
9/10/2011	1:53:28 AM	Helium valve closed
9/10/2011	1:53:28 AM	PH3 valve closed
9/10/2011	1:53:28 AM	Main Vac valve closed
9/10/2011	1:53:28 AM	Bypass valve closed
9/10/2011	1:53:28 AM	H2 valve opened
9/10/2011	1:53:28 AM	BCl3 valve opened
9/10/2011	1:53:28 AM	SiCl4 pre valve opened
9/10/2011	1:53:28 AM	SiCl4 post valve opened
9/10/2011	1:53:28 AM	Bubbler valve opened
9/10/2011	1:53:28 AM	Helium MFC set to  0.000000
9/10/2011	1:53:28 AM	H2 MFC set to  500.000000
9/10/2011	1:53:28 AM	BCl3 MFC set to  1.800000
9/10/2011	1:53:28 AM	PHl3 MFC set to  0.000000
9/10/2011	1:53:28 AM	SiCl4 MFC set to  50.000000
9/10/2011	1:53:28 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	1:53:28 AM	Tube furnace set to 1000
9/10/2011	2:05:28 AM	Helium valve closed
9/10/2011	2:05:28 AM	PH3 valve closed
9/10/2011	2:05:28 AM	Main Vac valve closed
9/10/2011	2:05:28 AM	Bypass valve closed
9/10/2011	2:05:28 AM	H2 valve opened
9/10/2011	2:05:28 AM	BCl3 valve opened
9/10/2011	2:05:28 AM	SiCl4 pre valve opened
9/10/2011	2:05:28 AM	SiCl4 post valve opened
9/10/2011	2:05:28 AM	Bubbler valve opened
9/10/2011	2:05:28 AM	Helium MFC set to  0.000000
9/10/2011	2:05:28 AM	H2 MFC set to  500.000000
9/10/2011	2:05:28 AM	BCl3 MFC set to  25.000000
9/10/2011	2:05:28 AM	PHl3 MFC set to  0.000000
9/10/2011	2:05:28 AM	SiCl4 MFC set to  50.000000
9/10/2011	2:05:28 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	2:05:28 AM	Tube furnace set to 1000
9/10/2011	2:05:58 AM	Helium valve closed
9/10/2011	2:05:58 AM	BCl3 valve closed
9/10/2011	2:05:58 AM	PH3 valve closed
9/10/2011	2:05:58 AM	SiCl4 pre valve closed
9/10/2011	2:05:58 AM	SiCl4 post valve closed
9/10/2011	2:05:58 AM	Main Vac valve closed
9/10/2011	2:05:58 AM	Bypass valve closed
9/10/2011	2:05:58 AM	H2 valve opened
9/10/2011	2:05:58 AM	Bubbler valve opened
9/10/2011	2:05:58 AM	Helium MFC set to  0.000000
9/10/2011	2:05:58 AM	H2 MFC set to  500.000000
9/10/2011	2:05:58 AM	BCl3 MFC set to  0.000000
9/10/2011	2:05:58 AM	PHl3 MFC set to  0.000000
9/10/2011	2:05:58 AM	SiCl4 MFC set to  0.000000
9/10/2011	2:05:58 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	2:05:59 AM	Tube furnace set to 750
9/10/2011	2:10:59 AM	H2 valve closed
9/10/2011	2:10:59 AM	BCl3 valve closed
9/10/2011	2:10:59 AM	PH3 valve closed
9/10/2011	2:10:59 AM	SiCl4 pre valve closed
9/10/2011	2:10:59 AM	SiCl4 post valve closed
9/10/2011	2:10:59 AM	Main Vac valve closed
9/10/2011	2:10:59 AM	Bypass valve closed
9/10/2011	2:10:59 AM	Helium valve opened
9/10/2011	2:10:59 AM	Bubbler valve opened
9/10/2011	2:10:59 AM	Helium MFC set to  500.000000
9/10/2011	2:10:59 AM	H2 MFC set to  0.000000
9/10/2011	2:10:59 AM	BCl3 MFC set to  0.000000
9/10/2011	2:10:59 AM	PHl3 MFC set to  0.000000
9/10/2011	2:10:59 AM	SiCl4 MFC set to  0.000000
9/10/2011	2:10:59 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	2:10:59 AM	Tube furnace set to 0
9/10/2011	2:30:59 AM	Helium valve closed
9/10/2011	2:30:59 AM	H2 valve closed
9/10/2011	2:30:59 AM	BCl3 valve closed
9/10/2011	2:30:59 AM	PH3 valve closed
9/10/2011	2:30:59 AM	SiCl4 pre valve closed
9/10/2011	2:30:59 AM	SiCl4 post valve closed
9/10/2011	2:30:59 AM	Main Vac valve closed
9/10/2011	2:30:59 AM	Bypass valve closed
9/10/2011	2:30:59 AM	Bubbler valve closed
9/10/2011	2:30:59 AM	Helium MFC set to  0.000000
9/10/2011	2:30:59 AM	H2 MFC set to  0.000000
9/10/2011	2:30:59 AM	BCl3 MFC set to  0.000000
9/10/2011	2:30:59 AM	PHl3 MFC set to  0.000000
9/10/2011	2:30:59 AM	SiCl4 MFC set to  0.000000
9/10/2011	2:30:59 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	2:30:59 AM	Tube furnace set to 0
9/10/2011	3:30:59 AM	H2 valve closed
9/10/2011	3:30:59 AM	BCl3 valve closed
9/10/2011	3:30:59 AM	PH3 valve closed
9/10/2011	3:30:59 AM	SiCl4 pre valve closed
9/10/2011	3:30:59 AM	SiCl4 post valve closed
9/10/2011	3:30:59 AM	Main Vac valve closed
9/10/2011	3:30:59 AM	Bypass valve closed
9/10/2011	3:30:59 AM	Bubbler valve closed
9/10/2011	3:30:59 AM	Helium valve opened
9/10/2011	3:30:59 AM	Helium MFC set to  500.000000
9/10/2011	3:30:59 AM	H2 MFC set to  0.000000
9/10/2011	3:30:59 AM	BCl3 MFC set to  0.000000
9/10/2011	3:30:59 AM	PHl3 MFC set to  0.000000
9/10/2011	3:30:59 AM	SiCl4 MFC set to  0.000000
9/10/2011	3:30:59 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	3:30:59 AM	Tube furnace set to 0
9/10/2011	3:31:05 AM	H2 valve closed
9/10/2011	3:31:05 AM	BCl3 valve closed
9/10/2011	3:31:05 AM	PH3 valve closed
9/10/2011	3:31:05 AM	SiCl4 pre valve closed
9/10/2011	3:31:05 AM	SiCl4 post valve closed
9/10/2011	3:31:05 AM	Main Vac valve closed
9/10/2011	3:31:05 AM	Bypass valve closed
9/10/2011	3:31:05 AM	Helium valve opened
9/10/2011	3:31:05 AM	Bubbler valve opened
9/10/2011	3:31:05 AM	Helium MFC set to  500.000000
9/10/2011	3:31:05 AM	H2 MFC set to  0.000000
9/10/2011	3:31:05 AM	BCl3 MFC set to  0.000000
9/10/2011	3:31:05 AM	PHl3 MFC set to  0.000000
9/10/2011	3:31:05 AM	SiCl4 MFC set to  0.000000
9/10/2011	3:31:05 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	3:31:05 AM	Tube furnace set to 0
9/10/2011	3:36:05 AM	Helium valve closed
9/10/2011	3:36:05 AM	H2 valve closed
9/10/2011	3:36:05 AM	BCl3 valve closed
9/10/2011	3:36:05 AM	PH3 valve closed
9/10/2011	3:36:05 AM	SiCl4 pre valve closed
9/10/2011	3:36:05 AM	SiCl4 post valve closed
9/10/2011	3:36:05 AM	Main Vac valve closed
9/10/2011	3:36:05 AM	Bypass valve closed
9/10/2011	3:36:05 AM	Bubbler valve closed
9/10/2011	3:36:05 AM	Helium MFC set to  0.000000
9/10/2011	3:36:05 AM	H2 MFC set to  0.000000
9/10/2011	3:36:05 AM	BCl3 MFC set to  0.000000
9/10/2011	3:36:05 AM	PHl3 MFC set to  0.000000
9/10/2011	3:36:05 AM	SiCl4 MFC set to  0.000000
9/10/2011	3:36:05 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	3:36:05 AM	Tube furnace set to 0
9/10/2011	3:36:06 AM	Helium valve closed
9/10/2011	3:36:06 AM	H2 valve closed
9/10/2011	3:36:06 AM	BCl3 valve closed
9/10/2011	3:36:06 AM	PH3 valve closed
9/10/2011	3:36:06 AM	SiCl4 pre valve closed
9/10/2011	3:36:06 AM	SiCl4 post valve closed
9/10/2011	3:36:06 AM	Main Vac valve closed
9/10/2011	3:36:06 AM	Bubbler valve closed
9/10/2011	3:36:06 AM	Bypass valve opened
9/10/2011	3:36:06 AM	Helium MFC set to  0.000000
9/10/2011	3:36:06 AM	H2 MFC set to  0.000000
9/10/2011	3:36:06 AM	BCl3 MFC set to  0.000000
9/10/2011	3:36:06 AM	PHl3 MFC set to  0.000000
9/10/2011	3:36:06 AM	SiCl4 MFC set to  0.000000
9/10/2011	3:36:06 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	3:36:06 AM	Tube furnace set to 0
9/10/2011	3:36:55 AM	Helium valve closed
9/10/2011	3:36:55 AM	H2 valve closed
9/10/2011	3:36:55 AM	BCl3 valve closed
9/10/2011	3:36:55 AM	PH3 valve closed
9/10/2011	3:36:55 AM	SiCl4 pre valve closed
9/10/2011	3:36:55 AM	SiCl4 post valve closed
9/10/2011	3:36:55 AM	Main Vac valve closed
9/10/2011	3:36:55 AM	Bubbler valve closed
9/10/2011	3:36:55 AM	Bypass valve opened
9/10/2011	3:36:55 AM	Helium MFC set to  0.000000
9/10/2011	3:36:55 AM	H2 MFC set to  0.000000
9/10/2011	3:36:55 AM	BCl3 MFC set to  0.000000
9/10/2011	3:36:55 AM	PHl3 MFC set to  0.000000
9/10/2011	3:36:55 AM	SiCl4 MFC set to  0.000000
9/10/2011	3:36:55 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	3:36:55 AM	Tube furnace set to 0
9/10/2011	3:37:55 AM	Helium valve closed
9/10/2011	3:37:55 AM	H2 valve closed
9/10/2011	3:37:55 AM	BCl3 valve closed
9/10/2011	3:37:55 AM	PH3 valve closed
9/10/2011	3:37:55 AM	SiCl4 pre valve closed
9/10/2011	3:37:55 AM	SiCl4 post valve closed
9/10/2011	3:37:55 AM	Bypass valve closed
9/10/2011	3:37:55 AM	Bubbler valve closed
9/10/2011	3:37:55 AM	Main Vac valve opened
9/10/2011	3:37:55 AM	Helium MFC set to  0.000000
9/10/2011	3:37:55 AM	H2 MFC set to  0.000000
9/10/2011	3:37:55 AM	BCl3 MFC set to  0.000000
9/10/2011	3:37:55 AM	PHl3 MFC set to  0.000000
9/10/2011	3:37:55 AM	SiCl4 MFC set to  0.000000
9/10/2011	3:37:55 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	3:37:55 AM	Tube furnace set to 0
9/10/2011	3:37:56 AM	Run finished at 3:37 AM
9/10/2011	11:21:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2011	11:21:58 AM	Recipe started at 11:21 AM
9/10/2011	11:21:58 AM	Helium valve closed
9/10/2011	11:21:58 AM	H2 valve closed
9/10/2011	11:21:58 AM	BCl3 valve closed
9/10/2011	11:21:58 AM	PH3 valve closed
9/10/2011	11:21:58 AM	SiCl4 pre valve closed
9/10/2011	11:21:58 AM	SiCl4 post valve closed
9/10/2011	11:21:58 AM	Main Vac valve closed
9/10/2011	11:21:58 AM	Bypass valve closed
9/10/2011	11:21:58 AM	Bubbler valve closed
9/10/2011	11:21:58 AM	Helium MFC set to  0.000000
9/10/2011	11:21:58 AM	H2 MFC set to  0.000000
9/10/2011	11:21:58 AM	BCl3 MFC set to  0.000000
9/10/2011	11:21:58 AM	PHl3 MFC set to  0.000000
9/10/2011	11:21:58 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:21:58 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:21:58 AM	Tube furnace set to 0
9/10/2011	11:22:01 AM	H2 valve closed
9/10/2011	11:22:01 AM	BCl3 valve closed
9/10/2011	11:22:01 AM	PH3 valve closed
9/10/2011	11:22:01 AM	SiCl4 pre valve closed
9/10/2011	11:22:01 AM	SiCl4 post valve closed
9/10/2011	11:22:01 AM	Main Vac valve closed
9/10/2011	11:22:01 AM	Bypass valve closed
9/10/2011	11:22:01 AM	Bubbler valve closed
9/10/2011	11:22:01 AM	Helium valve opened
9/10/2011	11:22:01 AM	Helium MFC set to  500.000000
9/10/2011	11:22:01 AM	H2 MFC set to  0.000000
9/10/2011	11:22:01 AM	BCl3 MFC set to  0.000000
9/10/2011	11:22:01 AM	PHl3 MFC set to  0.000000
9/10/2011	11:22:01 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:22:01 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:22:02 AM	Tube furnace set to 0
9/10/2011	11:23:07 AM	Helium valve closed
9/10/2011	11:23:07 AM	H2 valve closed
9/10/2011	11:23:07 AM	BCl3 valve closed
9/10/2011	11:23:07 AM	PH3 valve closed
9/10/2011	11:23:07 AM	SiCl4 pre valve closed
9/10/2011	11:23:07 AM	SiCl4 post valve closed
9/10/2011	11:23:07 AM	Main Vac valve closed
9/10/2011	11:23:07 AM	Bypass valve closed
9/10/2011	11:23:07 AM	Bubbler valve closed
9/10/2011	11:23:07 AM	Helium MFC set to  0.000000
9/10/2011	11:23:07 AM	H2 MFC set to  0.000000
9/10/2011	11:23:07 AM	BCl3 MFC set to  0.000000
9/10/2011	11:23:07 AM	PHl3 MFC set to  0.000000
9/10/2011	11:23:07 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:23:07 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:23:07 AM	Tube furnace set to 0
9/10/2011	11:23:08 AM	Run finished at 11:23 AM
9/10/2011	11:23:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2011	11:26:17 AM	Helium MFC set to  500.000000
9/10/2011	11:26:18 AM	Helium valve opened
9/10/2011	11:26:22 AM	Bubbler valve opened
9/10/2011	11:26:28 AM	Tube furnace set to 250
9/10/2011	11:27:58 AM	Bubbler valve closed
9/10/2011	11:27:59 AM	Helium valve closed
9/10/2011	11:28:01 AM	Helium MFC set to  0.000000
9/10/2011	11:28:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/10/2011	11:28:18 AM	Recipe started at 11:28 AM
9/10/2011	11:28:18 AM	Helium valve closed
9/10/2011	11:28:18 AM	H2 valve closed
9/10/2011	11:28:18 AM	BCl3 valve closed
9/10/2011	11:28:18 AM	PH3 valve closed
9/10/2011	11:28:18 AM	SiCl4 pre valve closed
9/10/2011	11:28:18 AM	SiCl4 post valve closed
9/10/2011	11:28:18 AM	Main Vac valve closed
9/10/2011	11:28:18 AM	Bubbler valve closed
9/10/2011	11:28:18 AM	Bypass valve opened
9/10/2011	11:28:18 AM	Helium MFC set to  0.000000
9/10/2011	11:28:18 AM	H2 MFC set to  0.000000
9/10/2011	11:28:18 AM	BCl3 MFC set to  0.000000
9/10/2011	11:28:18 AM	PHl3 MFC set to  0.000000
9/10/2011	11:28:18 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:28:18 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:28:18 AM	Tube furnace set to 0
9/10/2011	11:29:14 AM	Helium valve closed
9/10/2011	11:29:14 AM	H2 valve closed
9/10/2011	11:29:14 AM	BCl3 valve closed
9/10/2011	11:29:14 AM	PH3 valve closed
9/10/2011	11:29:14 AM	SiCl4 pre valve closed
9/10/2011	11:29:14 AM	SiCl4 post valve closed
9/10/2011	11:29:14 AM	Main Vac valve closed
9/10/2011	11:29:14 AM	Bubbler valve closed
9/10/2011	11:29:14 AM	Bypass valve opened
9/10/2011	11:29:14 AM	Helium MFC set to  0.000000
9/10/2011	11:29:14 AM	H2 MFC set to  0.000000
9/10/2011	11:29:14 AM	BCl3 MFC set to  0.000000
9/10/2011	11:29:14 AM	PHl3 MFC set to  0.000000
9/10/2011	11:29:14 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:29:14 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:29:14 AM	Tube furnace set to 0
9/10/2011	11:29:44 AM	Helium valve closed
9/10/2011	11:29:44 AM	H2 valve closed
9/10/2011	11:29:44 AM	BCl3 valve closed
9/10/2011	11:29:44 AM	PH3 valve closed
9/10/2011	11:29:44 AM	SiCl4 pre valve closed
9/10/2011	11:29:44 AM	SiCl4 post valve closed
9/10/2011	11:29:44 AM	Bypass valve closed
9/10/2011	11:29:44 AM	Bubbler valve closed
9/10/2011	11:29:44 AM	Main Vac valve opened
9/10/2011	11:29:44 AM	Helium MFC set to  0.000000
9/10/2011	11:29:44 AM	H2 MFC set to  0.000000
9/10/2011	11:29:44 AM	BCl3 MFC set to  0.000000
9/10/2011	11:29:44 AM	PHl3 MFC set to  0.000000
9/10/2011	11:29:44 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:29:44 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:29:44 AM	Tube furnace set to 0
9/10/2011	11:30:14 AM	H2 valve closed
9/10/2011	11:30:14 AM	BCl3 valve closed
9/10/2011	11:30:14 AM	PH3 valve closed
9/10/2011	11:30:14 AM	SiCl4 pre valve closed
9/10/2011	11:30:14 AM	SiCl4 post valve closed
9/10/2011	11:30:14 AM	Bypass valve closed
9/10/2011	11:30:14 AM	Bubbler valve closed
9/10/2011	11:30:14 AM	Helium valve opened
9/10/2011	11:30:14 AM	Main Vac valve opened
9/10/2011	11:30:14 AM	Helium MFC set to  20.000000
9/10/2011	11:30:14 AM	H2 MFC set to  0.000000
9/10/2011	11:30:14 AM	BCl3 MFC set to  0.000000
9/10/2011	11:30:14 AM	PHl3 MFC set to  0.000000
9/10/2011	11:30:14 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:30:14 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:30:14 AM	Tube furnace set to 0
9/10/2011	11:30:44 AM	Helium valve closed
9/10/2011	11:30:44 AM	H2 valve closed
9/10/2011	11:30:44 AM	BCl3 valve closed
9/10/2011	11:30:44 AM	PH3 valve closed
9/10/2011	11:30:44 AM	SiCl4 pre valve closed
9/10/2011	11:30:44 AM	SiCl4 post valve closed
9/10/2011	11:30:44 AM	Bypass valve closed
9/10/2011	11:30:44 AM	Bubbler valve closed
9/10/2011	11:30:44 AM	Main Vac valve opened
9/10/2011	11:30:44 AM	Helium MFC set to  0.000000
9/10/2011	11:30:44 AM	H2 MFC set to  0.000000
9/10/2011	11:30:44 AM	BCl3 MFC set to  0.000000
9/10/2011	11:30:44 AM	PHl3 MFC set to  0.000000
9/10/2011	11:30:44 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:30:44 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:30:45 AM	Tube furnace set to 0
9/10/2011	11:31:15 AM	H2 valve closed
9/10/2011	11:31:15 AM	BCl3 valve closed
9/10/2011	11:31:15 AM	PH3 valve closed
9/10/2011	11:31:15 AM	SiCl4 pre valve closed
9/10/2011	11:31:15 AM	SiCl4 post valve closed
9/10/2011	11:31:15 AM	Bypass valve closed
9/10/2011	11:31:15 AM	Bubbler valve closed
9/10/2011	11:31:15 AM	Helium valve opened
9/10/2011	11:31:15 AM	Main Vac valve opened
9/10/2011	11:31:15 AM	Helium MFC set to  20.000000
9/10/2011	11:31:15 AM	H2 MFC set to  0.000000
9/10/2011	11:31:15 AM	BCl3 MFC set to  0.000000
9/10/2011	11:31:15 AM	PHl3 MFC set to  0.000000
9/10/2011	11:31:15 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:31:15 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:31:15 AM	Tube furnace set to 0
9/10/2011	11:31:45 AM	Helium valve closed
9/10/2011	11:31:45 AM	H2 valve closed
9/10/2011	11:31:45 AM	BCl3 valve closed
9/10/2011	11:31:45 AM	PH3 valve closed
9/10/2011	11:31:45 AM	SiCl4 pre valve closed
9/10/2011	11:31:45 AM	SiCl4 post valve closed
9/10/2011	11:31:45 AM	Bypass valve closed
9/10/2011	11:31:45 AM	Bubbler valve closed
9/10/2011	11:31:45 AM	Main Vac valve opened
9/10/2011	11:31:45 AM	Helium MFC set to  0.000000
9/10/2011	11:31:45 AM	H2 MFC set to  0.000000
9/10/2011	11:31:45 AM	BCl3 MFC set to  0.000000
9/10/2011	11:31:45 AM	PHl3 MFC set to  0.000000
9/10/2011	11:31:45 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:31:45 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:31:45 AM	Tube furnace set to 0
9/10/2011	11:32:15 AM	H2 valve closed
9/10/2011	11:32:15 AM	BCl3 valve closed
9/10/2011	11:32:15 AM	PH3 valve closed
9/10/2011	11:32:15 AM	SiCl4 pre valve closed
9/10/2011	11:32:15 AM	SiCl4 post valve closed
9/10/2011	11:32:15 AM	Bypass valve closed
9/10/2011	11:32:15 AM	Bubbler valve closed
9/10/2011	11:32:15 AM	Helium valve opened
9/10/2011	11:32:15 AM	Main Vac valve opened
9/10/2011	11:32:15 AM	Helium MFC set to  20.000000
9/10/2011	11:32:15 AM	H2 MFC set to  0.000000
9/10/2011	11:32:15 AM	BCl3 MFC set to  0.000000
9/10/2011	11:32:15 AM	PHl3 MFC set to  0.000000
9/10/2011	11:32:15 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:32:15 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:32:15 AM	Tube furnace set to 0
9/10/2011	11:32:45 AM	Helium valve closed
9/10/2011	11:32:45 AM	H2 valve closed
9/10/2011	11:32:45 AM	BCl3 valve closed
9/10/2011	11:32:45 AM	PH3 valve closed
9/10/2011	11:32:45 AM	SiCl4 pre valve closed
9/10/2011	11:32:45 AM	SiCl4 post valve closed
9/10/2011	11:32:45 AM	Bypass valve closed
9/10/2011	11:32:45 AM	Bubbler valve closed
9/10/2011	11:32:45 AM	Main Vac valve opened
9/10/2011	11:32:45 AM	Helium MFC set to  0.000000
9/10/2011	11:32:45 AM	H2 MFC set to  0.000000
9/10/2011	11:32:45 AM	BCl3 MFC set to  0.000000
9/10/2011	11:32:45 AM	PHl3 MFC set to  0.000000
9/10/2011	11:32:45 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:32:45 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:32:45 AM	Tube furnace set to 0
9/10/2011	11:33:15 AM	H2 valve closed
9/10/2011	11:33:15 AM	BCl3 valve closed
9/10/2011	11:33:15 AM	PH3 valve closed
9/10/2011	11:33:15 AM	SiCl4 pre valve closed
9/10/2011	11:33:15 AM	SiCl4 post valve closed
9/10/2011	11:33:15 AM	Bypass valve closed
9/10/2011	11:33:15 AM	Bubbler valve closed
9/10/2011	11:33:15 AM	Helium valve opened
9/10/2011	11:33:15 AM	Main Vac valve opened
9/10/2011	11:33:15 AM	Helium MFC set to  20.000000
9/10/2011	11:33:15 AM	H2 MFC set to  0.000000
9/10/2011	11:33:15 AM	BCl3 MFC set to  0.000000
9/10/2011	11:33:15 AM	PHl3 MFC set to  0.000000
9/10/2011	11:33:15 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:33:15 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:33:16 AM	Tube furnace set to 0
9/10/2011	11:33:46 AM	Helium valve closed
9/10/2011	11:33:46 AM	H2 valve closed
9/10/2011	11:33:46 AM	BCl3 valve closed
9/10/2011	11:33:46 AM	PH3 valve closed
9/10/2011	11:33:46 AM	SiCl4 pre valve closed
9/10/2011	11:33:46 AM	SiCl4 post valve closed
9/10/2011	11:33:46 AM	Bypass valve closed
9/10/2011	11:33:46 AM	Bubbler valve closed
9/10/2011	11:33:46 AM	Main Vac valve opened
9/10/2011	11:33:46 AM	Helium MFC set to  0.000000
9/10/2011	11:33:46 AM	H2 MFC set to  0.000000
9/10/2011	11:33:46 AM	BCl3 MFC set to  0.000000
9/10/2011	11:33:46 AM	PHl3 MFC set to  0.000000
9/10/2011	11:33:46 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:33:46 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:33:46 AM	Tube furnace set to 0
9/10/2011	11:34:03 AM	Run aborted at 11:34 AM
9/10/2011	11:34:03 AM	Helium valve closed
9/10/2011	11:34:03 AM	H2 valve closed
9/10/2011	11:34:03 AM	BCl3 valve closed
9/10/2011	11:34:03 AM	PH3 valve closed
9/10/2011	11:34:03 AM	SiCl4 pre valve closed
9/10/2011	11:34:03 AM	SiCl4 post valve closed
9/10/2011	11:34:03 AM	Bypass valve closed
9/10/2011	11:34:03 AM	Main Vac valve closed
9/10/2011	11:34:03 AM	Bubbler valve closed
9/10/2011	11:34:03 AM	Helium MFC set to  0.000000
9/10/2011	11:34:03 AM	H2 MFC set to  0.000000
9/10/2011	11:34:03 AM	BCl3 MFC set to  0.000000
9/10/2011	11:34:03 AM	PHl3 MFC set to  0.000000
9/10/2011	11:34:03 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:34:03 AM	Tube furnace set to 0
9/10/2011	11:34:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/10/2011	11:34:05 AM	Main Vac valve opened
9/10/2011	11:36:08 AM	Recipe started at 11:36 AM
9/10/2011	11:36:08 AM	Helium valve closed
9/10/2011	11:36:08 AM	H2 valve closed
9/10/2011	11:36:08 AM	BCl3 valve closed
9/10/2011	11:36:08 AM	PH3 valve closed
9/10/2011	11:36:08 AM	SiCl4 pre valve closed
9/10/2011	11:36:08 AM	SiCl4 post valve closed
9/10/2011	11:36:08 AM	Bypass valve closed
9/10/2011	11:36:08 AM	Bubbler valve closed
9/10/2011	11:36:08 AM	Main Vac valve opened
9/10/2011	11:36:08 AM	Helium MFC set to  0.000000
9/10/2011	11:36:08 AM	H2 MFC set to  0.000000
9/10/2011	11:36:08 AM	BCl3 MFC set to  0.000000
9/10/2011	11:36:08 AM	PHl3 MFC set to  0.000000
9/10/2011	11:36:08 AM	SiCl4 MFC set to  0.000000
9/10/2011	11:36:08 AM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:36:09 AM	Tube furnace set to 180
9/10/2011	12:16:09 PM	H2 valve closed
9/10/2011	12:16:09 PM	BCl3 valve closed
9/10/2011	12:16:09 PM	PH3 valve closed
9/10/2011	12:16:09 PM	SiCl4 pre valve closed
9/10/2011	12:16:09 PM	SiCl4 post valve closed
9/10/2011	12:16:09 PM	Bypass valve closed
9/10/2011	12:16:09 PM	Bubbler valve closed
9/10/2011	12:16:09 PM	Helium valve opened
9/10/2011	12:16:09 PM	Main Vac valve opened
9/10/2011	12:16:09 PM	Helium MFC set to  10.000000
9/10/2011	12:16:09 PM	H2 MFC set to  0.000000
9/10/2011	12:16:09 PM	BCl3 MFC set to  0.000000
9/10/2011	12:16:09 PM	PHl3 MFC set to  0.000000
9/10/2011	12:16:09 PM	SiCl4 MFC set to  0.000000
9/10/2011	12:16:09 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:16:09 PM	Tube furnace set to 180
9/10/2011	12:16:39 PM	Helium valve closed
9/10/2011	12:16:39 PM	H2 valve closed
9/10/2011	12:16:39 PM	BCl3 valve closed
9/10/2011	12:16:39 PM	PH3 valve closed
9/10/2011	12:16:39 PM	SiCl4 pre valve closed
9/10/2011	12:16:39 PM	SiCl4 post valve closed
9/10/2011	12:16:39 PM	Bypass valve closed
9/10/2011	12:16:39 PM	Bubbler valve closed
9/10/2011	12:16:39 PM	Main Vac valve opened
9/10/2011	12:16:39 PM	Helium MFC set to  0.000000
9/10/2011	12:16:39 PM	H2 MFC set to  0.000000
9/10/2011	12:16:39 PM	BCl3 MFC set to  0.000000
9/10/2011	12:16:39 PM	PHl3 MFC set to  0.000000
9/10/2011	12:16:39 PM	SiCl4 MFC set to  0.000000
9/10/2011	12:16:39 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:16:39 PM	Tube furnace set to 180
9/10/2011	12:17:09 PM	H2 valve closed
9/10/2011	12:17:09 PM	BCl3 valve closed
9/10/2011	12:17:09 PM	PH3 valve closed
9/10/2011	12:17:09 PM	SiCl4 pre valve closed
9/10/2011	12:17:09 PM	SiCl4 post valve closed
9/10/2011	12:17:09 PM	Bypass valve closed
9/10/2011	12:17:09 PM	Bubbler valve closed
9/10/2011	12:17:09 PM	Helium valve opened
9/10/2011	12:17:09 PM	Main Vac valve opened
9/10/2011	12:17:09 PM	Helium MFC set to  10.000000
9/10/2011	12:17:09 PM	H2 MFC set to  0.000000
9/10/2011	12:17:09 PM	BCl3 MFC set to  0.000000
9/10/2011	12:17:09 PM	PHl3 MFC set to  0.000000
9/10/2011	12:17:09 PM	SiCl4 MFC set to  0.000000
9/10/2011	12:17:09 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:17:09 PM	Tube furnace set to 180
9/10/2011	12:17:39 PM	Helium valve closed
9/10/2011	12:17:39 PM	H2 valve closed
9/10/2011	12:17:39 PM	BCl3 valve closed
9/10/2011	12:17:39 PM	PH3 valve closed
9/10/2011	12:17:39 PM	SiCl4 pre valve closed
9/10/2011	12:17:39 PM	SiCl4 post valve closed
9/10/2011	12:17:39 PM	Bypass valve closed
9/10/2011	12:17:39 PM	Bubbler valve closed
9/10/2011	12:17:39 PM	Main Vac valve opened
9/10/2011	12:17:39 PM	Helium MFC set to  0.000000
9/10/2011	12:17:39 PM	H2 MFC set to  0.000000
9/10/2011	12:17:39 PM	BCl3 MFC set to  0.000000
9/10/2011	12:17:39 PM	PHl3 MFC set to  0.000000
9/10/2011	12:17:39 PM	SiCl4 MFC set to  0.000000
9/10/2011	12:17:39 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:17:39 PM	Tube furnace set to 180
9/10/2011	12:19:39 PM	Helium valve closed
9/10/2011	12:19:39 PM	BCl3 valve closed
9/10/2011	12:19:39 PM	PH3 valve closed
9/10/2011	12:19:39 PM	SiCl4 pre valve closed
9/10/2011	12:19:39 PM	SiCl4 post valve closed
9/10/2011	12:19:39 PM	Main Vac valve closed
9/10/2011	12:19:39 PM	Bypass valve closed
9/10/2011	12:19:39 PM	Bubbler valve closed
9/10/2011	12:19:39 PM	H2 valve opened
9/10/2011	12:19:39 PM	Helium MFC set to  0.000000
9/10/2011	12:19:39 PM	H2 MFC set to  500.000000
9/10/2011	12:19:39 PM	BCl3 MFC set to  0.000000
9/10/2011	12:19:39 PM	PHl3 MFC set to  0.000000
9/10/2011	12:19:39 PM	SiCl4 MFC set to  0.000000
9/10/2011	12:19:39 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:19:39 PM	Tube furnace set to 1000
9/10/2011	12:20:43 PM	Helium valve closed
9/10/2011	12:20:43 PM	BCl3 valve closed
9/10/2011	12:20:43 PM	PH3 valve closed
9/10/2011	12:20:43 PM	SiCl4 pre valve closed
9/10/2011	12:20:43 PM	SiCl4 post valve closed
9/10/2011	12:20:43 PM	Main Vac valve closed
9/10/2011	12:20:43 PM	Bypass valve closed
9/10/2011	12:20:43 PM	H2 valve opened
9/10/2011	12:20:43 PM	Bubbler valve opened
9/10/2011	12:20:43 PM	Helium MFC set to  0.000000
9/10/2011	12:20:43 PM	H2 MFC set to  500.000000
9/10/2011	12:20:43 PM	BCl3 MFC set to  0.000000
9/10/2011	12:20:43 PM	PHl3 MFC set to  0.000000
9/10/2011	12:20:43 PM	SiCl4 MFC set to  0.000000
9/10/2011	12:20:43 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:20:43 PM	Tube furnace set to 1000
9/10/2011	12:20:44 PM	Helium valve closed
9/10/2011	12:20:44 PM	BCl3 valve closed
9/10/2011	12:20:44 PM	PH3 valve closed
9/10/2011	12:20:44 PM	SiCl4 pre valve closed
9/10/2011	12:20:44 PM	SiCl4 post valve closed
9/10/2011	12:20:44 PM	Main Vac valve closed
9/10/2011	12:20:44 PM	Bypass valve closed
9/10/2011	12:20:44 PM	H2 valve opened
9/10/2011	12:20:44 PM	Bubbler valve opened
9/10/2011	12:20:44 PM	Helium MFC set to  0.000000
9/10/2011	12:20:44 PM	H2 MFC set to  500.000000
9/10/2011	12:20:44 PM	BCl3 MFC set to  0.000000
9/10/2011	12:20:44 PM	PHl3 MFC set to  0.000000
9/10/2011	12:20:44 PM	SiCl4 MFC set to  0.000000
9/10/2011	12:20:44 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:20:44 PM	Tube furnace set to 1000
9/10/2011	12:40:44 PM	Helium valve closed
9/10/2011	12:40:44 PM	PH3 valve closed
9/10/2011	12:40:44 PM	Main Vac valve closed
9/10/2011	12:40:44 PM	Bypass valve closed
9/10/2011	12:40:44 PM	H2 valve opened
9/10/2011	12:40:44 PM	BCl3 valve opened
9/10/2011	12:40:44 PM	SiCl4 pre valve opened
9/10/2011	12:40:44 PM	SiCl4 post valve opened
9/10/2011	12:40:44 PM	Bubbler valve opened
9/10/2011	12:40:44 PM	Helium MFC set to  0.000000
9/10/2011	12:40:44 PM	H2 MFC set to  500.000000
9/10/2011	12:40:44 PM	BCl3 MFC set to  2.500000
9/10/2011	12:40:44 PM	PHl3 MFC set to  0.000000
9/10/2011	12:40:44 PM	SiCl4 MFC set to  50.000000
9/10/2011	12:40:44 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:40:44 PM	Tube furnace set to 1000
9/10/2011	12:54:44 PM	Helium valve closed
9/10/2011	12:54:44 PM	BCl3 valve closed
9/10/2011	12:54:44 PM	PH3 valve closed
9/10/2011	12:54:44 PM	SiCl4 pre valve closed
9/10/2011	12:54:44 PM	SiCl4 post valve closed
9/10/2011	12:54:44 PM	Main Vac valve closed
9/10/2011	12:54:44 PM	Bypass valve closed
9/10/2011	12:54:44 PM	H2 valve opened
9/10/2011	12:54:44 PM	Bubbler valve opened
9/10/2011	12:54:44 PM	Helium MFC set to  0.000000
9/10/2011	12:54:44 PM	H2 MFC set to  500.000000
9/10/2011	12:54:44 PM	BCl3 MFC set to  0.000000
9/10/2011	12:54:44 PM	PHl3 MFC set to  0.000000
9/10/2011	12:54:44 PM	SiCl4 MFC set to  0.000000
9/10/2011	12:54:44 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:54:44 PM	Tube furnace set to 750
9/10/2011	12:59:44 PM	H2 valve closed
9/10/2011	12:59:44 PM	BCl3 valve closed
9/10/2011	12:59:44 PM	PH3 valve closed
9/10/2011	12:59:44 PM	SiCl4 pre valve closed
9/10/2011	12:59:44 PM	SiCl4 post valve closed
9/10/2011	12:59:44 PM	Main Vac valve closed
9/10/2011	12:59:44 PM	Bypass valve closed
9/10/2011	12:59:44 PM	Helium valve opened
9/10/2011	12:59:44 PM	Bubbler valve opened
9/10/2011	12:59:44 PM	Helium MFC set to  500.000000
9/10/2011	12:59:44 PM	H2 MFC set to  0.000000
9/10/2011	12:59:44 PM	BCl3 MFC set to  0.000000
9/10/2011	12:59:44 PM	PHl3 MFC set to  0.000000
9/10/2011	12:59:44 PM	SiCl4 MFC set to  0.000000
9/10/2011	12:59:44 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	12:59:45 PM	Tube furnace set to 0
9/10/2011	1:19:45 PM	Helium valve closed
9/10/2011	1:19:45 PM	H2 valve closed
9/10/2011	1:19:45 PM	BCl3 valve closed
9/10/2011	1:19:45 PM	PH3 valve closed
9/10/2011	1:19:45 PM	SiCl4 pre valve closed
9/10/2011	1:19:45 PM	SiCl4 post valve closed
9/10/2011	1:19:45 PM	Main Vac valve closed
9/10/2011	1:19:45 PM	Bypass valve closed
9/10/2011	1:19:45 PM	Bubbler valve closed
9/10/2011	1:19:45 PM	Helium MFC set to  0.000000
9/10/2011	1:19:45 PM	H2 MFC set to  0.000000
9/10/2011	1:19:45 PM	BCl3 MFC set to  0.000000
9/10/2011	1:19:45 PM	PHl3 MFC set to  0.000000
9/10/2011	1:19:45 PM	SiCl4 MFC set to  0.000000
9/10/2011	1:19:45 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	1:19:45 PM	Tube furnace set to 0
9/10/2011	2:19:45 PM	H2 valve closed
9/10/2011	2:19:45 PM	BCl3 valve closed
9/10/2011	2:19:45 PM	PH3 valve closed
9/10/2011	2:19:45 PM	SiCl4 pre valve closed
9/10/2011	2:19:45 PM	SiCl4 post valve closed
9/10/2011	2:19:45 PM	Main Vac valve closed
9/10/2011	2:19:45 PM	Bypass valve closed
9/10/2011	2:19:45 PM	Bubbler valve closed
9/10/2011	2:19:45 PM	Helium valve opened
9/10/2011	2:19:45 PM	Helium MFC set to  500.000000
9/10/2011	2:19:45 PM	H2 MFC set to  0.000000
9/10/2011	2:19:45 PM	BCl3 MFC set to  0.000000
9/10/2011	2:19:45 PM	PHl3 MFC set to  0.000000
9/10/2011	2:19:45 PM	SiCl4 MFC set to  0.000000
9/10/2011	2:19:45 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	2:19:45 PM	Tube furnace set to 0
9/10/2011	2:19:51 PM	H2 valve closed
9/10/2011	2:19:51 PM	BCl3 valve closed
9/10/2011	2:19:51 PM	PH3 valve closed
9/10/2011	2:19:51 PM	SiCl4 pre valve closed
9/10/2011	2:19:51 PM	SiCl4 post valve closed
9/10/2011	2:19:51 PM	Main Vac valve closed
9/10/2011	2:19:51 PM	Bypass valve closed
9/10/2011	2:19:51 PM	Helium valve opened
9/10/2011	2:19:51 PM	Bubbler valve opened
9/10/2011	2:19:51 PM	Helium MFC set to  500.000000
9/10/2011	2:19:51 PM	H2 MFC set to  0.000000
9/10/2011	2:19:51 PM	BCl3 MFC set to  0.000000
9/10/2011	2:19:51 PM	PHl3 MFC set to  0.000000
9/10/2011	2:19:51 PM	SiCl4 MFC set to  0.000000
9/10/2011	2:19:51 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	2:19:51 PM	Tube furnace set to 0
9/10/2011	2:24:51 PM	Helium valve closed
9/10/2011	2:24:51 PM	H2 valve closed
9/10/2011	2:24:51 PM	BCl3 valve closed
9/10/2011	2:24:51 PM	PH3 valve closed
9/10/2011	2:24:51 PM	SiCl4 pre valve closed
9/10/2011	2:24:51 PM	SiCl4 post valve closed
9/10/2011	2:24:51 PM	Main Vac valve closed
9/10/2011	2:24:51 PM	Bypass valve closed
9/10/2011	2:24:51 PM	Bubbler valve closed
9/10/2011	2:24:51 PM	Helium MFC set to  0.000000
9/10/2011	2:24:51 PM	H2 MFC set to  0.000000
9/10/2011	2:24:51 PM	BCl3 MFC set to  0.000000
9/10/2011	2:24:51 PM	PHl3 MFC set to  0.000000
9/10/2011	2:24:51 PM	SiCl4 MFC set to  0.000000
9/10/2011	2:24:51 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	2:24:51 PM	Tube furnace set to 0
9/10/2011	2:24:52 PM	Helium valve closed
9/10/2011	2:24:52 PM	H2 valve closed
9/10/2011	2:24:52 PM	BCl3 valve closed
9/10/2011	2:24:52 PM	PH3 valve closed
9/10/2011	2:24:52 PM	SiCl4 pre valve closed
9/10/2011	2:24:52 PM	SiCl4 post valve closed
9/10/2011	2:24:52 PM	Main Vac valve closed
9/10/2011	2:24:52 PM	Bubbler valve closed
9/10/2011	2:24:52 PM	Bypass valve opened
9/10/2011	2:24:52 PM	Helium MFC set to  0.000000
9/10/2011	2:24:52 PM	H2 MFC set to  0.000000
9/10/2011	2:24:52 PM	BCl3 MFC set to  0.000000
9/10/2011	2:24:52 PM	PHl3 MFC set to  0.000000
9/10/2011	2:24:52 PM	SiCl4 MFC set to  0.000000
9/10/2011	2:24:52 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	2:24:52 PM	Tube furnace set to 0
9/10/2011	2:25:41 PM	Helium valve closed
9/10/2011	2:25:41 PM	H2 valve closed
9/10/2011	2:25:41 PM	BCl3 valve closed
9/10/2011	2:25:41 PM	PH3 valve closed
9/10/2011	2:25:41 PM	SiCl4 pre valve closed
9/10/2011	2:25:41 PM	SiCl4 post valve closed
9/10/2011	2:25:41 PM	Main Vac valve closed
9/10/2011	2:25:41 PM	Bubbler valve closed
9/10/2011	2:25:41 PM	Bypass valve opened
9/10/2011	2:25:41 PM	Helium MFC set to  0.000000
9/10/2011	2:25:41 PM	H2 MFC set to  0.000000
9/10/2011	2:25:41 PM	BCl3 MFC set to  0.000000
9/10/2011	2:25:41 PM	PHl3 MFC set to  0.000000
9/10/2011	2:25:41 PM	SiCl4 MFC set to  0.000000
9/10/2011	2:25:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	2:25:41 PM	Tube furnace set to 0
9/10/2011	2:26:41 PM	Helium valve closed
9/10/2011	2:26:41 PM	H2 valve closed
9/10/2011	2:26:41 PM	BCl3 valve closed
9/10/2011	2:26:41 PM	PH3 valve closed
9/10/2011	2:26:41 PM	SiCl4 pre valve closed
9/10/2011	2:26:41 PM	SiCl4 post valve closed
9/10/2011	2:26:41 PM	Bypass valve closed
9/10/2011	2:26:41 PM	Bubbler valve closed
9/10/2011	2:26:41 PM	Main Vac valve opened
9/10/2011	2:26:41 PM	Helium MFC set to  0.000000
9/10/2011	2:26:41 PM	H2 MFC set to  0.000000
9/10/2011	2:26:41 PM	BCl3 MFC set to  0.000000
9/10/2011	2:26:41 PM	PHl3 MFC set to  0.000000
9/10/2011	2:26:41 PM	SiCl4 MFC set to  0.000000
9/10/2011	2:26:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	2:26:41 PM	Tube furnace set to 0
9/10/2011	2:26:42 PM	Run finished at 2:26 PM
9/10/2011	4:57:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2011	4:57:37 PM	Recipe started at 4:57 PM
9/10/2011	4:57:37 PM	Helium valve closed
9/10/2011	4:57:37 PM	H2 valve closed
9/10/2011	4:57:37 PM	BCl3 valve closed
9/10/2011	4:57:37 PM	PH3 valve closed
9/10/2011	4:57:37 PM	SiCl4 pre valve closed
9/10/2011	4:57:37 PM	SiCl4 post valve closed
9/10/2011	4:57:37 PM	Main Vac valve closed
9/10/2011	4:57:37 PM	Bypass valve closed
9/10/2011	4:57:37 PM	Bubbler valve closed
9/10/2011	4:57:37 PM	Helium MFC set to  0.000000
9/10/2011	4:57:37 PM	H2 MFC set to  0.000000
9/10/2011	4:57:37 PM	BCl3 MFC set to  0.000000
9/10/2011	4:57:37 PM	PHl3 MFC set to  0.000000
9/10/2011	4:57:37 PM	SiCl4 MFC set to  0.000000
9/10/2011	4:57:37 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	4:57:37 PM	Tube furnace set to 0
9/10/2011	4:57:40 PM	H2 valve closed
9/10/2011	4:57:40 PM	BCl3 valve closed
9/10/2011	4:57:40 PM	PH3 valve closed
9/10/2011	4:57:40 PM	SiCl4 pre valve closed
9/10/2011	4:57:40 PM	SiCl4 post valve closed
9/10/2011	4:57:40 PM	Main Vac valve closed
9/10/2011	4:57:40 PM	Bypass valve closed
9/10/2011	4:57:40 PM	Bubbler valve closed
9/10/2011	4:57:40 PM	Helium valve opened
9/10/2011	4:57:40 PM	Helium MFC set to  500.000000
9/10/2011	4:57:40 PM	H2 MFC set to  0.000000
9/10/2011	4:57:40 PM	BCl3 MFC set to  0.000000
9/10/2011	4:57:40 PM	PHl3 MFC set to  0.000000
9/10/2011	4:57:40 PM	SiCl4 MFC set to  0.000000
9/10/2011	4:57:40 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	4:57:40 PM	Tube furnace set to 0
9/10/2011	4:58:44 PM	Helium valve closed
9/10/2011	4:58:44 PM	H2 valve closed
9/10/2011	4:58:44 PM	BCl3 valve closed
9/10/2011	4:58:44 PM	PH3 valve closed
9/10/2011	4:58:44 PM	SiCl4 pre valve closed
9/10/2011	4:58:44 PM	SiCl4 post valve closed
9/10/2011	4:58:44 PM	Main Vac valve closed
9/10/2011	4:58:44 PM	Bypass valve closed
9/10/2011	4:58:44 PM	Bubbler valve closed
9/10/2011	4:58:44 PM	Helium MFC set to  0.000000
9/10/2011	4:58:44 PM	H2 MFC set to  0.000000
9/10/2011	4:58:44 PM	BCl3 MFC set to  0.000000
9/10/2011	4:58:44 PM	PHl3 MFC set to  0.000000
9/10/2011	4:58:44 PM	SiCl4 MFC set to  0.000000
9/10/2011	4:58:44 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	4:58:44 PM	Tube furnace set to 0
9/10/2011	4:58:45 PM	Run finished at 4:58 PM
9/10/2011	4:58:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2011	5:01:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/10/2011	5:02:10 PM	Recipe started at 5:02 PM
9/10/2011	5:02:10 PM	Helium valve closed
9/10/2011	5:02:10 PM	H2 valve closed
9/10/2011	5:02:10 PM	BCl3 valve closed
9/10/2011	5:02:10 PM	PH3 valve closed
9/10/2011	5:02:10 PM	SiCl4 pre valve closed
9/10/2011	5:02:10 PM	SiCl4 post valve closed
9/10/2011	5:02:10 PM	Main Vac valve closed
9/10/2011	5:02:10 PM	Bubbler valve closed
9/10/2011	5:02:10 PM	Bypass valve opened
9/10/2011	5:02:10 PM	Helium MFC set to  0.000000
9/10/2011	5:02:10 PM	H2 MFC set to  0.000000
9/10/2011	5:02:10 PM	BCl3 MFC set to  0.000000
9/10/2011	5:02:10 PM	PHl3 MFC set to  0.000000
9/10/2011	5:02:10 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:02:10 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:02:10 PM	Tube furnace set to 0
9/10/2011	5:03:16 PM	Helium valve closed
9/10/2011	5:03:16 PM	H2 valve closed
9/10/2011	5:03:16 PM	BCl3 valve closed
9/10/2011	5:03:16 PM	PH3 valve closed
9/10/2011	5:03:16 PM	SiCl4 pre valve closed
9/10/2011	5:03:16 PM	SiCl4 post valve closed
9/10/2011	5:03:16 PM	Main Vac valve closed
9/10/2011	5:03:16 PM	Bubbler valve closed
9/10/2011	5:03:16 PM	Bypass valve opened
9/10/2011	5:03:16 PM	Helium MFC set to  0.000000
9/10/2011	5:03:16 PM	H2 MFC set to  0.000000
9/10/2011	5:03:16 PM	BCl3 MFC set to  0.000000
9/10/2011	5:03:16 PM	PHl3 MFC set to  0.000000
9/10/2011	5:03:16 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:03:16 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:03:16 PM	Tube furnace set to 0
9/10/2011	5:03:46 PM	Helium valve closed
9/10/2011	5:03:46 PM	H2 valve closed
9/10/2011	5:03:46 PM	BCl3 valve closed
9/10/2011	5:03:46 PM	PH3 valve closed
9/10/2011	5:03:46 PM	SiCl4 pre valve closed
9/10/2011	5:03:46 PM	SiCl4 post valve closed
9/10/2011	5:03:46 PM	Bypass valve closed
9/10/2011	5:03:46 PM	Bubbler valve closed
9/10/2011	5:03:46 PM	Main Vac valve opened
9/10/2011	5:03:46 PM	Helium MFC set to  0.000000
9/10/2011	5:03:46 PM	H2 MFC set to  0.000000
9/10/2011	5:03:46 PM	BCl3 MFC set to  0.000000
9/10/2011	5:03:46 PM	PHl3 MFC set to  0.000000
9/10/2011	5:03:46 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:03:46 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:03:47 PM	Tube furnace set to 0
9/10/2011	5:04:17 PM	H2 valve closed
9/10/2011	5:04:17 PM	BCl3 valve closed
9/10/2011	5:04:17 PM	PH3 valve closed
9/10/2011	5:04:17 PM	SiCl4 pre valve closed
9/10/2011	5:04:17 PM	SiCl4 post valve closed
9/10/2011	5:04:17 PM	Bypass valve closed
9/10/2011	5:04:17 PM	Bubbler valve closed
9/10/2011	5:04:17 PM	Helium valve opened
9/10/2011	5:04:17 PM	Main Vac valve opened
9/10/2011	5:04:17 PM	Helium MFC set to  20.000000
9/10/2011	5:04:17 PM	H2 MFC set to  0.000000
9/10/2011	5:04:17 PM	BCl3 MFC set to  0.000000
9/10/2011	5:04:17 PM	PHl3 MFC set to  0.000000
9/10/2011	5:04:17 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:04:17 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:04:17 PM	Tube furnace set to 0
9/10/2011	5:04:47 PM	Helium valve closed
9/10/2011	5:04:47 PM	H2 valve closed
9/10/2011	5:04:47 PM	BCl3 valve closed
9/10/2011	5:04:47 PM	PH3 valve closed
9/10/2011	5:04:47 PM	SiCl4 pre valve closed
9/10/2011	5:04:47 PM	SiCl4 post valve closed
9/10/2011	5:04:47 PM	Bypass valve closed
9/10/2011	5:04:47 PM	Bubbler valve closed
9/10/2011	5:04:47 PM	Main Vac valve opened
9/10/2011	5:04:47 PM	Helium MFC set to  0.000000
9/10/2011	5:04:47 PM	H2 MFC set to  0.000000
9/10/2011	5:04:47 PM	BCl3 MFC set to  0.000000
9/10/2011	5:04:47 PM	PHl3 MFC set to  0.000000
9/10/2011	5:04:47 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:04:47 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:04:47 PM	Tube furnace set to 0
9/10/2011	5:05:17 PM	H2 valve closed
9/10/2011	5:05:17 PM	BCl3 valve closed
9/10/2011	5:05:17 PM	PH3 valve closed
9/10/2011	5:05:17 PM	SiCl4 pre valve closed
9/10/2011	5:05:17 PM	SiCl4 post valve closed
9/10/2011	5:05:17 PM	Bypass valve closed
9/10/2011	5:05:17 PM	Bubbler valve closed
9/10/2011	5:05:17 PM	Helium valve opened
9/10/2011	5:05:17 PM	Main Vac valve opened
9/10/2011	5:05:17 PM	Helium MFC set to  20.000000
9/10/2011	5:05:17 PM	H2 MFC set to  0.000000
9/10/2011	5:05:17 PM	BCl3 MFC set to  0.000000
9/10/2011	5:05:17 PM	PHl3 MFC set to  0.000000
9/10/2011	5:05:17 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:05:17 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:05:17 PM	Tube furnace set to 0
9/10/2011	5:05:47 PM	Helium valve closed
9/10/2011	5:05:47 PM	H2 valve closed
9/10/2011	5:05:47 PM	BCl3 valve closed
9/10/2011	5:05:47 PM	PH3 valve closed
9/10/2011	5:05:47 PM	SiCl4 pre valve closed
9/10/2011	5:05:47 PM	SiCl4 post valve closed
9/10/2011	5:05:47 PM	Bypass valve closed
9/10/2011	5:05:47 PM	Bubbler valve closed
9/10/2011	5:05:47 PM	Main Vac valve opened
9/10/2011	5:05:47 PM	Helium MFC set to  0.000000
9/10/2011	5:05:47 PM	H2 MFC set to  0.000000
9/10/2011	5:05:47 PM	BCl3 MFC set to  0.000000
9/10/2011	5:05:47 PM	PHl3 MFC set to  0.000000
9/10/2011	5:05:47 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:05:47 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:05:47 PM	Tube furnace set to 0
9/10/2011	5:06:17 PM	H2 valve closed
9/10/2011	5:06:17 PM	BCl3 valve closed
9/10/2011	5:06:17 PM	PH3 valve closed
9/10/2011	5:06:17 PM	SiCl4 pre valve closed
9/10/2011	5:06:17 PM	SiCl4 post valve closed
9/10/2011	5:06:17 PM	Bypass valve closed
9/10/2011	5:06:17 PM	Bubbler valve closed
9/10/2011	5:06:17 PM	Helium valve opened
9/10/2011	5:06:17 PM	Main Vac valve opened
9/10/2011	5:06:17 PM	Helium MFC set to  20.000000
9/10/2011	5:06:17 PM	H2 MFC set to  0.000000
9/10/2011	5:06:17 PM	BCl3 MFC set to  0.000000
9/10/2011	5:06:17 PM	PHl3 MFC set to  0.000000
9/10/2011	5:06:17 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:06:17 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:06:18 PM	Tube furnace set to 0
9/10/2011	5:06:48 PM	Helium valve closed
9/10/2011	5:06:48 PM	H2 valve closed
9/10/2011	5:06:48 PM	BCl3 valve closed
9/10/2011	5:06:48 PM	PH3 valve closed
9/10/2011	5:06:48 PM	SiCl4 pre valve closed
9/10/2011	5:06:48 PM	SiCl4 post valve closed
9/10/2011	5:06:48 PM	Bypass valve closed
9/10/2011	5:06:48 PM	Bubbler valve closed
9/10/2011	5:06:48 PM	Main Vac valve opened
9/10/2011	5:06:48 PM	Helium MFC set to  0.000000
9/10/2011	5:06:48 PM	H2 MFC set to  0.000000
9/10/2011	5:06:48 PM	BCl3 MFC set to  0.000000
9/10/2011	5:06:48 PM	PHl3 MFC set to  0.000000
9/10/2011	5:06:48 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:06:48 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:06:48 PM	Tube furnace set to 0
9/10/2011	5:07:18 PM	H2 valve closed
9/10/2011	5:07:18 PM	BCl3 valve closed
9/10/2011	5:07:18 PM	PH3 valve closed
9/10/2011	5:07:18 PM	SiCl4 pre valve closed
9/10/2011	5:07:18 PM	SiCl4 post valve closed
9/10/2011	5:07:18 PM	Bypass valve closed
9/10/2011	5:07:18 PM	Bubbler valve closed
9/10/2011	5:07:18 PM	Helium valve opened
9/10/2011	5:07:18 PM	Main Vac valve opened
9/10/2011	5:07:18 PM	Helium MFC set to  20.000000
9/10/2011	5:07:18 PM	H2 MFC set to  0.000000
9/10/2011	5:07:18 PM	BCl3 MFC set to  0.000000
9/10/2011	5:07:18 PM	PHl3 MFC set to  0.000000
9/10/2011	5:07:18 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:07:18 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:07:18 PM	Tube furnace set to 0
9/10/2011	5:07:48 PM	Helium valve closed
9/10/2011	5:07:48 PM	H2 valve closed
9/10/2011	5:07:48 PM	BCl3 valve closed
9/10/2011	5:07:48 PM	PH3 valve closed
9/10/2011	5:07:48 PM	SiCl4 pre valve closed
9/10/2011	5:07:48 PM	SiCl4 post valve closed
9/10/2011	5:07:48 PM	Bypass valve closed
9/10/2011	5:07:48 PM	Bubbler valve closed
9/10/2011	5:07:48 PM	Main Vac valve opened
9/10/2011	5:07:48 PM	Helium MFC set to  0.000000
9/10/2011	5:07:48 PM	H2 MFC set to  0.000000
9/10/2011	5:07:48 PM	BCl3 MFC set to  0.000000
9/10/2011	5:07:48 PM	PHl3 MFC set to  0.000000
9/10/2011	5:07:48 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:07:48 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:07:48 PM	Tube furnace set to 0
9/10/2011	5:08:18 PM	H2 valve closed
9/10/2011	5:08:18 PM	BCl3 valve closed
9/10/2011	5:08:18 PM	PH3 valve closed
9/10/2011	5:08:18 PM	SiCl4 pre valve closed
9/10/2011	5:08:18 PM	SiCl4 post valve closed
9/10/2011	5:08:18 PM	Bypass valve closed
9/10/2011	5:08:18 PM	Bubbler valve closed
9/10/2011	5:08:18 PM	Helium valve opened
9/10/2011	5:08:18 PM	Main Vac valve opened
9/10/2011	5:08:18 PM	Helium MFC set to  20.000000
9/10/2011	5:08:18 PM	H2 MFC set to  0.000000
9/10/2011	5:08:18 PM	BCl3 MFC set to  0.000000
9/10/2011	5:08:18 PM	PHl3 MFC set to  0.000000
9/10/2011	5:08:18 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:08:18 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:08:19 PM	Tube furnace set to 0
9/10/2011	5:08:49 PM	Helium valve closed
9/10/2011	5:08:49 PM	H2 valve closed
9/10/2011	5:08:49 PM	BCl3 valve closed
9/10/2011	5:08:49 PM	PH3 valve closed
9/10/2011	5:08:49 PM	SiCl4 pre valve closed
9/10/2011	5:08:49 PM	SiCl4 post valve closed
9/10/2011	5:08:49 PM	Bypass valve closed
9/10/2011	5:08:49 PM	Bubbler valve closed
9/10/2011	5:08:49 PM	Main Vac valve opened
9/10/2011	5:08:49 PM	Helium MFC set to  0.000000
9/10/2011	5:08:49 PM	H2 MFC set to  0.000000
9/10/2011	5:08:49 PM	BCl3 MFC set to  0.000000
9/10/2011	5:08:49 PM	PHl3 MFC set to  0.000000
9/10/2011	5:08:49 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:08:49 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:08:49 PM	Tube furnace set to 0
9/10/2011	5:09:19 PM	H2 valve closed
9/10/2011	5:09:19 PM	BCl3 valve closed
9/10/2011	5:09:19 PM	PH3 valve closed
9/10/2011	5:09:19 PM	SiCl4 pre valve closed
9/10/2011	5:09:19 PM	SiCl4 post valve closed
9/10/2011	5:09:19 PM	Bypass valve closed
9/10/2011	5:09:19 PM	Bubbler valve closed
9/10/2011	5:09:19 PM	Helium valve opened
9/10/2011	5:09:19 PM	Main Vac valve opened
9/10/2011	5:09:19 PM	Helium MFC set to  20.000000
9/10/2011	5:09:19 PM	H2 MFC set to  0.000000
9/10/2011	5:09:19 PM	BCl3 MFC set to  0.000000
9/10/2011	5:09:19 PM	PHl3 MFC set to  0.000000
9/10/2011	5:09:19 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:09:19 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:09:19 PM	Tube furnace set to 0
9/10/2011	5:09:49 PM	Helium valve closed
9/10/2011	5:09:49 PM	H2 valve closed
9/10/2011	5:09:49 PM	BCl3 valve closed
9/10/2011	5:09:49 PM	PH3 valve closed
9/10/2011	5:09:49 PM	SiCl4 pre valve closed
9/10/2011	5:09:49 PM	SiCl4 post valve closed
9/10/2011	5:09:49 PM	Bypass valve closed
9/10/2011	5:09:49 PM	Bubbler valve closed
9/10/2011	5:09:49 PM	Main Vac valve opened
9/10/2011	5:09:49 PM	Helium MFC set to  0.000000
9/10/2011	5:09:49 PM	H2 MFC set to  0.000000
9/10/2011	5:09:49 PM	BCl3 MFC set to  0.000000
9/10/2011	5:09:49 PM	PHl3 MFC set to  0.000000
9/10/2011	5:09:49 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:09:49 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:09:49 PM	Tube furnace set to 0
9/10/2011	5:10:19 PM	H2 valve closed
9/10/2011	5:10:19 PM	BCl3 valve closed
9/10/2011	5:10:19 PM	PH3 valve closed
9/10/2011	5:10:19 PM	SiCl4 pre valve closed
9/10/2011	5:10:19 PM	SiCl4 post valve closed
9/10/2011	5:10:19 PM	Bypass valve closed
9/10/2011	5:10:19 PM	Bubbler valve closed
9/10/2011	5:10:19 PM	Helium valve opened
9/10/2011	5:10:19 PM	Main Vac valve opened
9/10/2011	5:10:19 PM	Helium MFC set to  20.000000
9/10/2011	5:10:19 PM	H2 MFC set to  0.000000
9/10/2011	5:10:19 PM	BCl3 MFC set to  0.000000
9/10/2011	5:10:19 PM	PHl3 MFC set to  0.000000
9/10/2011	5:10:19 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:10:19 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:10:19 PM	Tube furnace set to 0
9/10/2011	5:10:49 PM	Helium valve closed
9/10/2011	5:10:49 PM	H2 valve closed
9/10/2011	5:10:49 PM	BCl3 valve closed
9/10/2011	5:10:49 PM	PH3 valve closed
9/10/2011	5:10:49 PM	SiCl4 pre valve closed
9/10/2011	5:10:49 PM	SiCl4 post valve closed
9/10/2011	5:10:49 PM	Bypass valve closed
9/10/2011	5:10:49 PM	Bubbler valve closed
9/10/2011	5:10:49 PM	Main Vac valve opened
9/10/2011	5:10:49 PM	Helium MFC set to  0.000000
9/10/2011	5:10:49 PM	H2 MFC set to  0.000000
9/10/2011	5:10:49 PM	BCl3 MFC set to  0.000000
9/10/2011	5:10:49 PM	PHl3 MFC set to  0.000000
9/10/2011	5:10:49 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:10:49 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:10:50 PM	Tube furnace set to 0
9/10/2011	5:11:20 PM	H2 valve closed
9/10/2011	5:11:20 PM	BCl3 valve closed
9/10/2011	5:11:20 PM	PH3 valve closed
9/10/2011	5:11:20 PM	SiCl4 pre valve closed
9/10/2011	5:11:20 PM	SiCl4 post valve closed
9/10/2011	5:11:20 PM	Bypass valve closed
9/10/2011	5:11:20 PM	Bubbler valve closed
9/10/2011	5:11:20 PM	Helium valve opened
9/10/2011	5:11:20 PM	Main Vac valve opened
9/10/2011	5:11:20 PM	Helium MFC set to  20.000000
9/10/2011	5:11:20 PM	H2 MFC set to  0.000000
9/10/2011	5:11:20 PM	BCl3 MFC set to  0.000000
9/10/2011	5:11:20 PM	PHl3 MFC set to  0.000000
9/10/2011	5:11:20 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:11:20 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:11:20 PM	Tube furnace set to 0
9/10/2011	5:11:50 PM	Helium valve closed
9/10/2011	5:11:50 PM	H2 valve closed
9/10/2011	5:11:50 PM	BCl3 valve closed
9/10/2011	5:11:50 PM	PH3 valve closed
9/10/2011	5:11:50 PM	SiCl4 pre valve closed
9/10/2011	5:11:50 PM	SiCl4 post valve closed
9/10/2011	5:11:50 PM	Bypass valve closed
9/10/2011	5:11:50 PM	Bubbler valve closed
9/10/2011	5:11:50 PM	Main Vac valve opened
9/10/2011	5:11:50 PM	Helium MFC set to  0.000000
9/10/2011	5:11:50 PM	H2 MFC set to  0.000000
9/10/2011	5:11:50 PM	BCl3 MFC set to  0.000000
9/10/2011	5:11:50 PM	PHl3 MFC set to  0.000000
9/10/2011	5:11:50 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:11:50 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:11:50 PM	Tube furnace set to 0
9/10/2011	5:12:20 PM	H2 valve closed
9/10/2011	5:12:20 PM	BCl3 valve closed
9/10/2011	5:12:20 PM	PH3 valve closed
9/10/2011	5:12:20 PM	SiCl4 pre valve closed
9/10/2011	5:12:20 PM	SiCl4 post valve closed
9/10/2011	5:12:20 PM	Bypass valve closed
9/10/2011	5:12:20 PM	Bubbler valve closed
9/10/2011	5:12:20 PM	Helium valve opened
9/10/2011	5:12:20 PM	Main Vac valve opened
9/10/2011	5:12:20 PM	Helium MFC set to  20.000000
9/10/2011	5:12:20 PM	H2 MFC set to  0.000000
9/10/2011	5:12:20 PM	BCl3 MFC set to  0.000000
9/10/2011	5:12:20 PM	PHl3 MFC set to  0.000000
9/10/2011	5:12:20 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:12:20 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:12:20 PM	Tube furnace set to 0
9/10/2011	5:12:50 PM	Helium valve closed
9/10/2011	5:12:50 PM	H2 valve closed
9/10/2011	5:12:50 PM	BCl3 valve closed
9/10/2011	5:12:50 PM	PH3 valve closed
9/10/2011	5:12:50 PM	SiCl4 pre valve closed
9/10/2011	5:12:50 PM	SiCl4 post valve closed
9/10/2011	5:12:50 PM	Bypass valve closed
9/10/2011	5:12:50 PM	Bubbler valve closed
9/10/2011	5:12:50 PM	Main Vac valve opened
9/10/2011	5:12:50 PM	Helium MFC set to  0.000000
9/10/2011	5:12:50 PM	H2 MFC set to  0.000000
9/10/2011	5:12:50 PM	BCl3 MFC set to  0.000000
9/10/2011	5:12:50 PM	PHl3 MFC set to  0.000000
9/10/2011	5:12:50 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:12:50 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:12:50 PM	Tube furnace set to 0
9/10/2011	5:13:20 PM	H2 valve closed
9/10/2011	5:13:20 PM	BCl3 valve closed
9/10/2011	5:13:20 PM	PH3 valve closed
9/10/2011	5:13:20 PM	SiCl4 pre valve closed
9/10/2011	5:13:20 PM	SiCl4 post valve closed
9/10/2011	5:13:21 PM	Bypass valve closed
9/10/2011	5:13:21 PM	Bubbler valve closed
9/10/2011	5:13:21 PM	Helium valve opened
9/10/2011	5:13:21 PM	Main Vac valve opened
9/10/2011	5:13:21 PM	Helium MFC set to  20.000000
9/10/2011	5:13:21 PM	H2 MFC set to  0.000000
9/10/2011	5:13:21 PM	BCl3 MFC set to  0.000000
9/10/2011	5:13:21 PM	PHl3 MFC set to  0.000000
9/10/2011	5:13:21 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:13:21 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:13:21 PM	Tube furnace set to 0
9/10/2011	5:13:51 PM	Helium valve closed
9/10/2011	5:13:51 PM	H2 valve closed
9/10/2011	5:13:51 PM	BCl3 valve closed
9/10/2011	5:13:51 PM	PH3 valve closed
9/10/2011	5:13:51 PM	SiCl4 pre valve closed
9/10/2011	5:13:51 PM	SiCl4 post valve closed
9/10/2011	5:13:51 PM	Bypass valve closed
9/10/2011	5:13:51 PM	Bubbler valve closed
9/10/2011	5:13:51 PM	Main Vac valve opened
9/10/2011	5:13:51 PM	Helium MFC set to  0.000000
9/10/2011	5:13:51 PM	H2 MFC set to  0.000000
9/10/2011	5:13:51 PM	BCl3 MFC set to  0.000000
9/10/2011	5:13:51 PM	PHl3 MFC set to  0.000000
9/10/2011	5:13:51 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:13:51 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:13:51 PM	Tube furnace set to 0
9/10/2011	5:13:52 PM	Run finished at 5:13 PM
9/10/2011	5:13:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/10/2011	5:14:27 PM	Recipe started at 5:14 PM
9/10/2011	5:14:27 PM	Helium valve closed
9/10/2011	5:14:27 PM	H2 valve closed
9/10/2011	5:14:27 PM	BCl3 valve closed
9/10/2011	5:14:27 PM	PH3 valve closed
9/10/2011	5:14:27 PM	SiCl4 pre valve closed
9/10/2011	5:14:27 PM	SiCl4 post valve closed
9/10/2011	5:14:27 PM	Bypass valve closed
9/10/2011	5:14:27 PM	Bubbler valve closed
9/10/2011	5:14:27 PM	Main Vac valve opened
9/10/2011	5:14:27 PM	Helium MFC set to  0.000000
9/10/2011	5:14:27 PM	H2 MFC set to  0.000000
9/10/2011	5:14:27 PM	BCl3 MFC set to  0.000000
9/10/2011	5:14:27 PM	PHl3 MFC set to  0.000000
9/10/2011	5:14:27 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:14:27 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:14:27 PM	Tube furnace set to 180
9/10/2011	5:54:27 PM	H2 valve closed
9/10/2011	5:54:27 PM	BCl3 valve closed
9/10/2011	5:54:27 PM	PH3 valve closed
9/10/2011	5:54:27 PM	SiCl4 pre valve closed
9/10/2011	5:54:27 PM	SiCl4 post valve closed
9/10/2011	5:54:27 PM	Bypass valve closed
9/10/2011	5:54:27 PM	Bubbler valve closed
9/10/2011	5:54:27 PM	Helium valve opened
9/10/2011	5:54:27 PM	Main Vac valve opened
9/10/2011	5:54:27 PM	Helium MFC set to  10.000000
9/10/2011	5:54:27 PM	H2 MFC set to  0.000000
9/10/2011	5:54:27 PM	BCl3 MFC set to  0.000000
9/10/2011	5:54:27 PM	PHl3 MFC set to  0.000000
9/10/2011	5:54:27 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:54:27 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:54:27 PM	Tube furnace set to 180
9/10/2011	5:54:57 PM	Helium valve closed
9/10/2011	5:54:57 PM	H2 valve closed
9/10/2011	5:54:57 PM	BCl3 valve closed
9/10/2011	5:54:57 PM	PH3 valve closed
9/10/2011	5:54:57 PM	SiCl4 pre valve closed
9/10/2011	5:54:57 PM	SiCl4 post valve closed
9/10/2011	5:54:57 PM	Bypass valve closed
9/10/2011	5:54:57 PM	Bubbler valve closed
9/10/2011	5:54:57 PM	Main Vac valve opened
9/10/2011	5:54:57 PM	Helium MFC set to  0.000000
9/10/2011	5:54:57 PM	H2 MFC set to  0.000000
9/10/2011	5:54:57 PM	BCl3 MFC set to  0.000000
9/10/2011	5:54:57 PM	PHl3 MFC set to  0.000000
9/10/2011	5:54:57 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:54:57 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:54:58 PM	Tube furnace set to 180
9/10/2011	5:55:28 PM	H2 valve closed
9/10/2011	5:55:28 PM	BCl3 valve closed
9/10/2011	5:55:28 PM	PH3 valve closed
9/10/2011	5:55:28 PM	SiCl4 pre valve closed
9/10/2011	5:55:28 PM	SiCl4 post valve closed
9/10/2011	5:55:28 PM	Bypass valve closed
9/10/2011	5:55:28 PM	Bubbler valve closed
9/10/2011	5:55:28 PM	Helium valve opened
9/10/2011	5:55:28 PM	Main Vac valve opened
9/10/2011	5:55:28 PM	Helium MFC set to  10.000000
9/10/2011	5:55:28 PM	H2 MFC set to  0.000000
9/10/2011	5:55:28 PM	BCl3 MFC set to  0.000000
9/10/2011	5:55:28 PM	PHl3 MFC set to  0.000000
9/10/2011	5:55:28 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:55:28 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:55:28 PM	Tube furnace set to 180
9/10/2011	5:55:58 PM	Helium valve closed
9/10/2011	5:55:58 PM	H2 valve closed
9/10/2011	5:55:58 PM	BCl3 valve closed
9/10/2011	5:55:58 PM	PH3 valve closed
9/10/2011	5:55:58 PM	SiCl4 pre valve closed
9/10/2011	5:55:58 PM	SiCl4 post valve closed
9/10/2011	5:55:58 PM	Bypass valve closed
9/10/2011	5:55:58 PM	Bubbler valve closed
9/10/2011	5:55:58 PM	Main Vac valve opened
9/10/2011	5:55:58 PM	Helium MFC set to  0.000000
9/10/2011	5:55:58 PM	H2 MFC set to  0.000000
9/10/2011	5:55:58 PM	BCl3 MFC set to  0.000000
9/10/2011	5:55:58 PM	PHl3 MFC set to  0.000000
9/10/2011	5:55:58 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:55:58 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:55:58 PM	Tube furnace set to 180
9/10/2011	5:57:58 PM	Helium valve closed
9/10/2011	5:57:58 PM	BCl3 valve closed
9/10/2011	5:57:58 PM	PH3 valve closed
9/10/2011	5:57:58 PM	SiCl4 pre valve closed
9/10/2011	5:57:58 PM	SiCl4 post valve closed
9/10/2011	5:57:58 PM	Main Vac valve closed
9/10/2011	5:57:58 PM	Bypass valve closed
9/10/2011	5:57:58 PM	Bubbler valve closed
9/10/2011	5:57:58 PM	H2 valve opened
9/10/2011	5:57:58 PM	Helium MFC set to  0.000000
9/10/2011	5:57:58 PM	H2 MFC set to  500.000000
9/10/2011	5:57:58 PM	BCl3 MFC set to  0.000000
9/10/2011	5:57:58 PM	PHl3 MFC set to  0.000000
9/10/2011	5:57:58 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:57:58 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:57:58 PM	Tube furnace set to 1000
9/10/2011	5:59:02 PM	Helium valve closed
9/10/2011	5:59:02 PM	BCl3 valve closed
9/10/2011	5:59:02 PM	PH3 valve closed
9/10/2011	5:59:02 PM	SiCl4 pre valve closed
9/10/2011	5:59:02 PM	SiCl4 post valve closed
9/10/2011	5:59:02 PM	Main Vac valve closed
9/10/2011	5:59:02 PM	Bypass valve closed
9/10/2011	5:59:02 PM	H2 valve opened
9/10/2011	5:59:02 PM	Bubbler valve opened
9/10/2011	5:59:02 PM	Helium MFC set to  0.000000
9/10/2011	5:59:02 PM	H2 MFC set to  500.000000
9/10/2011	5:59:02 PM	BCl3 MFC set to  0.000000
9/10/2011	5:59:02 PM	PHl3 MFC set to  0.000000
9/10/2011	5:59:02 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:59:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:59:02 PM	Tube furnace set to 1000
9/10/2011	5:59:03 PM	Helium valve closed
9/10/2011	5:59:03 PM	BCl3 valve closed
9/10/2011	5:59:03 PM	PH3 valve closed
9/10/2011	5:59:03 PM	SiCl4 pre valve closed
9/10/2011	5:59:03 PM	SiCl4 post valve closed
9/10/2011	5:59:03 PM	Main Vac valve closed
9/10/2011	5:59:03 PM	Bypass valve closed
9/10/2011	5:59:03 PM	H2 valve opened
9/10/2011	5:59:03 PM	Bubbler valve opened
9/10/2011	5:59:03 PM	Helium MFC set to  0.000000
9/10/2011	5:59:03 PM	H2 MFC set to  500.000000
9/10/2011	5:59:03 PM	BCl3 MFC set to  0.000000
9/10/2011	5:59:03 PM	PHl3 MFC set to  0.000000
9/10/2011	5:59:03 PM	SiCl4 MFC set to  0.000000
9/10/2011	5:59:03 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	5:59:03 PM	Tube furnace set to 1000
9/10/2011	6:19:03 PM	Helium valve closed
9/10/2011	6:19:03 PM	PH3 valve closed
9/10/2011	6:19:03 PM	Main Vac valve closed
9/10/2011	6:19:03 PM	Bypass valve closed
9/10/2011	6:19:03 PM	H2 valve opened
9/10/2011	6:19:03 PM	BCl3 valve opened
9/10/2011	6:19:03 PM	SiCl4 pre valve opened
9/10/2011	6:19:03 PM	SiCl4 post valve opened
9/10/2011	6:19:03 PM	Bubbler valve opened
9/10/2011	6:19:03 PM	Helium MFC set to  0.000000
9/10/2011	6:19:03 PM	H2 MFC set to  500.000000
9/10/2011	6:19:03 PM	BCl3 MFC set to  2.500000
9/10/2011	6:19:03 PM	PHl3 MFC set to  0.000000
9/10/2011	6:19:03 PM	SiCl4 MFC set to  50.000000
9/10/2011	6:19:03 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	6:19:03 PM	Tube furnace set to 1000
9/10/2011	6:33:03 PM	Helium valve closed
9/10/2011	6:33:03 PM	BCl3 valve closed
9/10/2011	6:33:03 PM	PH3 valve closed
9/10/2011	6:33:03 PM	SiCl4 pre valve closed
9/10/2011	6:33:03 PM	SiCl4 post valve closed
9/10/2011	6:33:03 PM	Main Vac valve closed
9/10/2011	6:33:03 PM	Bypass valve closed
9/10/2011	6:33:03 PM	H2 valve opened
9/10/2011	6:33:03 PM	Bubbler valve opened
9/10/2011	6:33:03 PM	Helium MFC set to  0.000000
9/10/2011	6:33:03 PM	H2 MFC set to  500.000000
9/10/2011	6:33:03 PM	BCl3 MFC set to  0.000000
9/10/2011	6:33:03 PM	PHl3 MFC set to  0.000000
9/10/2011	6:33:03 PM	SiCl4 MFC set to  0.000000
9/10/2011	6:33:03 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	6:33:03 PM	Tube furnace set to 750
9/10/2011	6:38:03 PM	H2 valve closed
9/10/2011	6:38:03 PM	BCl3 valve closed
9/10/2011	6:38:03 PM	PH3 valve closed
9/10/2011	6:38:03 PM	SiCl4 pre valve closed
9/10/2011	6:38:03 PM	SiCl4 post valve closed
9/10/2011	6:38:03 PM	Main Vac valve closed
9/10/2011	6:38:03 PM	Bypass valve closed
9/10/2011	6:38:03 PM	Helium valve opened
9/10/2011	6:38:03 PM	Bubbler valve opened
9/10/2011	6:38:03 PM	Helium MFC set to  500.000000
9/10/2011	6:38:03 PM	H2 MFC set to  0.000000
9/10/2011	6:38:03 PM	BCl3 MFC set to  0.000000
9/10/2011	6:38:03 PM	PHl3 MFC set to  0.000000
9/10/2011	6:38:03 PM	SiCl4 MFC set to  0.000000
9/10/2011	6:38:03 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	6:38:04 PM	Tube furnace set to 0
9/10/2011	6:58:04 PM	Helium valve closed
9/10/2011	6:58:04 PM	H2 valve closed
9/10/2011	6:58:04 PM	BCl3 valve closed
9/10/2011	6:58:04 PM	PH3 valve closed
9/10/2011	6:58:04 PM	SiCl4 pre valve closed
9/10/2011	6:58:04 PM	SiCl4 post valve closed
9/10/2011	6:58:04 PM	Main Vac valve closed
9/10/2011	6:58:04 PM	Bypass valve closed
9/10/2011	6:58:04 PM	Bubbler valve closed
9/10/2011	6:58:04 PM	Helium MFC set to  0.000000
9/10/2011	6:58:04 PM	H2 MFC set to  0.000000
9/10/2011	6:58:04 PM	BCl3 MFC set to  0.000000
9/10/2011	6:58:04 PM	PHl3 MFC set to  0.000000
9/10/2011	6:58:04 PM	SiCl4 MFC set to  0.000000
9/10/2011	6:58:04 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	6:58:04 PM	Tube furnace set to 0
9/10/2011	7:58:04 PM	H2 valve closed
9/10/2011	7:58:04 PM	BCl3 valve closed
9/10/2011	7:58:04 PM	PH3 valve closed
9/10/2011	7:58:04 PM	SiCl4 pre valve closed
9/10/2011	7:58:04 PM	SiCl4 post valve closed
9/10/2011	7:58:04 PM	Main Vac valve closed
9/10/2011	7:58:04 PM	Bypass valve closed
9/10/2011	7:58:04 PM	Bubbler valve closed
9/10/2011	7:58:04 PM	Helium valve opened
9/10/2011	7:58:04 PM	Helium MFC set to  500.000000
9/10/2011	7:58:04 PM	H2 MFC set to  0.000000
9/10/2011	7:58:04 PM	BCl3 MFC set to  0.000000
9/10/2011	7:58:04 PM	PHl3 MFC set to  0.000000
9/10/2011	7:58:04 PM	SiCl4 MFC set to  0.000000
9/10/2011	7:58:04 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	7:58:04 PM	Tube furnace set to 0
9/10/2011	7:58:09 PM	H2 valve closed
9/10/2011	7:58:09 PM	BCl3 valve closed
9/10/2011	7:58:09 PM	PH3 valve closed
9/10/2011	7:58:09 PM	SiCl4 pre valve closed
9/10/2011	7:58:09 PM	SiCl4 post valve closed
9/10/2011	7:58:09 PM	Main Vac valve closed
9/10/2011	7:58:09 PM	Bypass valve closed
9/10/2011	7:58:09 PM	Helium valve opened
9/10/2011	7:58:09 PM	Bubbler valve opened
9/10/2011	7:58:09 PM	Helium MFC set to  500.000000
9/10/2011	7:58:09 PM	H2 MFC set to  0.000000
9/10/2011	7:58:09 PM	BCl3 MFC set to  0.000000
9/10/2011	7:58:09 PM	PHl3 MFC set to  0.000000
9/10/2011	7:58:09 PM	SiCl4 MFC set to  0.000000
9/10/2011	7:58:09 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	7:58:10 PM	Tube furnace set to 0
9/10/2011	8:03:10 PM	Helium valve closed
9/10/2011	8:03:10 PM	H2 valve closed
9/10/2011	8:03:10 PM	BCl3 valve closed
9/10/2011	8:03:10 PM	PH3 valve closed
9/10/2011	8:03:10 PM	SiCl4 pre valve closed
9/10/2011	8:03:10 PM	SiCl4 post valve closed
9/10/2011	8:03:10 PM	Main Vac valve closed
9/10/2011	8:03:10 PM	Bypass valve closed
9/10/2011	8:03:10 PM	Bubbler valve closed
9/10/2011	8:03:10 PM	Helium MFC set to  0.000000
9/10/2011	8:03:10 PM	H2 MFC set to  0.000000
9/10/2011	8:03:10 PM	BCl3 MFC set to  0.000000
9/10/2011	8:03:10 PM	PHl3 MFC set to  0.000000
9/10/2011	8:03:10 PM	SiCl4 MFC set to  0.000000
9/10/2011	8:03:10 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	8:03:10 PM	Tube furnace set to 0
9/10/2011	8:03:11 PM	Helium valve closed
9/10/2011	8:03:11 PM	H2 valve closed
9/10/2011	8:03:11 PM	BCl3 valve closed
9/10/2011	8:03:11 PM	PH3 valve closed
9/10/2011	8:03:11 PM	SiCl4 pre valve closed
9/10/2011	8:03:11 PM	SiCl4 post valve closed
9/10/2011	8:03:11 PM	Main Vac valve closed
9/10/2011	8:03:11 PM	Bubbler valve closed
9/10/2011	8:03:11 PM	Bypass valve opened
9/10/2011	8:03:11 PM	Helium MFC set to  0.000000
9/10/2011	8:03:11 PM	H2 MFC set to  0.000000
9/10/2011	8:03:11 PM	BCl3 MFC set to  0.000000
9/10/2011	8:03:11 PM	PHl3 MFC set to  0.000000
9/10/2011	8:03:11 PM	SiCl4 MFC set to  0.000000
9/10/2011	8:03:11 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	8:03:11 PM	Tube furnace set to 0
9/10/2011	8:04:00 PM	Helium valve closed
9/10/2011	8:04:00 PM	H2 valve closed
9/10/2011	8:04:00 PM	BCl3 valve closed
9/10/2011	8:04:00 PM	PH3 valve closed
9/10/2011	8:04:00 PM	SiCl4 pre valve closed
9/10/2011	8:04:00 PM	SiCl4 post valve closed
9/10/2011	8:04:00 PM	Main Vac valve closed
9/10/2011	8:04:00 PM	Bubbler valve closed
9/10/2011	8:04:00 PM	Bypass valve opened
9/10/2011	8:04:00 PM	Helium MFC set to  0.000000
9/10/2011	8:04:00 PM	H2 MFC set to  0.000000
9/10/2011	8:04:00 PM	BCl3 MFC set to  0.000000
9/10/2011	8:04:00 PM	PHl3 MFC set to  0.000000
9/10/2011	8:04:00 PM	SiCl4 MFC set to  0.000000
9/10/2011	8:04:00 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	8:04:00 PM	Tube furnace set to 0
9/10/2011	8:05:00 PM	Helium valve closed
9/10/2011	8:05:00 PM	H2 valve closed
9/10/2011	8:05:00 PM	BCl3 valve closed
9/10/2011	8:05:00 PM	PH3 valve closed
9/10/2011	8:05:00 PM	SiCl4 pre valve closed
9/10/2011	8:05:00 PM	SiCl4 post valve closed
9/10/2011	8:05:00 PM	Bypass valve closed
9/10/2011	8:05:00 PM	Bubbler valve closed
9/10/2011	8:05:00 PM	Main Vac valve opened
9/10/2011	8:05:00 PM	Helium MFC set to  0.000000
9/10/2011	8:05:00 PM	H2 MFC set to  0.000000
9/10/2011	8:05:00 PM	BCl3 MFC set to  0.000000
9/10/2011	8:05:00 PM	PHl3 MFC set to  0.000000
9/10/2011	8:05:00 PM	SiCl4 MFC set to  0.000000
9/10/2011	8:05:00 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	8:05:00 PM	Tube furnace set to 0
9/10/2011	8:05:01 PM	Run finished at 8:05 PM
9/10/2011	8:57:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2011	8:57:58 PM	Recipe started at 8:57 PM
9/10/2011	8:57:58 PM	Helium valve closed
9/10/2011	8:57:58 PM	H2 valve closed
9/10/2011	8:57:58 PM	BCl3 valve closed
9/10/2011	8:57:58 PM	PH3 valve closed
9/10/2011	8:57:58 PM	SiCl4 pre valve closed
9/10/2011	8:57:58 PM	SiCl4 post valve closed
9/10/2011	8:57:58 PM	Main Vac valve closed
9/10/2011	8:57:58 PM	Bypass valve closed
9/10/2011	8:57:58 PM	Bubbler valve closed
9/10/2011	8:57:58 PM	Helium MFC set to  0.000000
9/10/2011	8:57:58 PM	H2 MFC set to  0.000000
9/10/2011	8:57:58 PM	BCl3 MFC set to  0.000000
9/10/2011	8:57:58 PM	PHl3 MFC set to  0.000000
9/10/2011	8:57:58 PM	SiCl4 MFC set to  0.000000
9/10/2011	8:57:58 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	8:57:58 PM	Tube furnace set to 0
9/10/2011	8:58:01 PM	H2 valve closed
9/10/2011	8:58:01 PM	BCl3 valve closed
9/10/2011	8:58:01 PM	PH3 valve closed
9/10/2011	8:58:01 PM	SiCl4 pre valve closed
9/10/2011	8:58:01 PM	SiCl4 post valve closed
9/10/2011	8:58:01 PM	Main Vac valve closed
9/10/2011	8:58:01 PM	Bypass valve closed
9/10/2011	8:58:01 PM	Bubbler valve closed
9/10/2011	8:58:01 PM	Helium valve opened
9/10/2011	8:58:01 PM	Helium MFC set to  500.000000
9/10/2011	8:58:01 PM	H2 MFC set to  0.000000
9/10/2011	8:58:01 PM	BCl3 MFC set to  0.000000
9/10/2011	8:58:01 PM	PHl3 MFC set to  0.000000
9/10/2011	8:58:01 PM	SiCl4 MFC set to  0.000000
9/10/2011	8:58:01 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	8:58:01 PM	Tube furnace set to 0
9/10/2011	8:59:03 PM	Helium valve closed
9/10/2011	8:59:03 PM	H2 valve closed
9/10/2011	8:59:03 PM	BCl3 valve closed
9/10/2011	8:59:03 PM	PH3 valve closed
9/10/2011	8:59:03 PM	SiCl4 pre valve closed
9/10/2011	8:59:03 PM	SiCl4 post valve closed
9/10/2011	8:59:03 PM	Main Vac valve closed
9/10/2011	8:59:03 PM	Bypass valve closed
9/10/2011	8:59:03 PM	Bubbler valve closed
9/10/2011	8:59:03 PM	Helium MFC set to  0.000000
9/10/2011	8:59:03 PM	H2 MFC set to  0.000000
9/10/2011	8:59:03 PM	BCl3 MFC set to  0.000000
9/10/2011	8:59:03 PM	PHl3 MFC set to  0.000000
9/10/2011	8:59:03 PM	SiCl4 MFC set to  0.000000
9/10/2011	8:59:03 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	8:59:03 PM	Tube furnace set to 0
9/10/2011	8:59:04 PM	Run finished at 8:59 PM
9/10/2011	8:59:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2011	8:59:11 PM	Helium MFC set to  500.000000
9/10/2011	8:59:12 PM	Helium valve opened
9/10/2011	8:59:15 PM	Bubbler valve opened
9/10/2011	8:59:43 PM	Bubbler valve closed
9/10/2011	8:59:43 PM	Helium valve closed
9/10/2011	8:59:45 PM	Helium MFC set to  0.000000
9/10/2011	9:00:03 PM	Helium MFC set to  500.000000
9/10/2011	9:00:04 PM	Helium valve opened
9/10/2011	9:00:05 PM	Bubbler valve opened
9/10/2011	9:05:33 PM	Bubbler valve closed
9/10/2011	9:05:34 PM	Helium valve closed
9/10/2011	9:05:37 PM	Helium MFC set to  0.000000
9/10/2011	9:05:43 PM	Tube furnace set to 0
9/10/2011	9:05:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/10/2011	9:05:57 PM	Recipe started at 9:05 PM
9/10/2011	9:05:57 PM	Helium valve closed
9/10/2011	9:05:57 PM	H2 valve closed
9/10/2011	9:05:57 PM	BCl3 valve closed
9/10/2011	9:05:57 PM	PH3 valve closed
9/10/2011	9:05:57 PM	SiCl4 pre valve closed
9/10/2011	9:05:57 PM	SiCl4 post valve closed
9/10/2011	9:05:57 PM	Main Vac valve closed
9/10/2011	9:05:57 PM	Bubbler valve closed
9/10/2011	9:05:57 PM	Bypass valve opened
9/10/2011	9:05:57 PM	Helium MFC set to  0.000000
9/10/2011	9:05:57 PM	H2 MFC set to  0.000000
9/10/2011	9:05:57 PM	BCl3 MFC set to  0.000000
9/10/2011	9:05:57 PM	PHl3 MFC set to  0.000000
9/10/2011	9:05:57 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:05:57 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	9:05:58 PM	Tube furnace set to 0
9/10/2011	9:06:55 PM	Helium valve closed
9/10/2011	9:06:55 PM	H2 valve closed
9/10/2011	9:06:55 PM	BCl3 valve closed
9/10/2011	9:06:55 PM	PH3 valve closed
9/10/2011	9:06:55 PM	SiCl4 pre valve closed
9/10/2011	9:06:55 PM	SiCl4 post valve closed
9/10/2011	9:06:55 PM	Main Vac valve closed
9/10/2011	9:06:55 PM	Bubbler valve closed
9/10/2011	9:06:55 PM	Bypass valve opened
9/10/2011	9:06:55 PM	Helium MFC set to  0.000000
9/10/2011	9:06:55 PM	H2 MFC set to  0.000000
9/10/2011	9:06:55 PM	BCl3 MFC set to  0.000000
9/10/2011	9:06:55 PM	PHl3 MFC set to  0.000000
9/10/2011	9:06:55 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:06:55 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	9:06:55 PM	Tube furnace set to 0
9/10/2011	9:07:25 PM	Helium valve closed
9/10/2011	9:07:25 PM	H2 valve closed
9/10/2011	9:07:25 PM	BCl3 valve closed
9/10/2011	9:07:25 PM	PH3 valve closed
9/10/2011	9:07:25 PM	SiCl4 pre valve closed
9/10/2011	9:07:25 PM	SiCl4 post valve closed
9/10/2011	9:07:25 PM	Bypass valve closed
9/10/2011	9:07:25 PM	Bubbler valve closed
9/10/2011	9:07:25 PM	Main Vac valve opened
9/10/2011	9:07:25 PM	Helium MFC set to  0.000000
9/10/2011	9:07:25 PM	H2 MFC set to  0.000000
9/10/2011	9:07:25 PM	BCl3 MFC set to  0.000000
9/10/2011	9:07:25 PM	PHl3 MFC set to  0.000000
9/10/2011	9:07:25 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:07:25 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	9:07:25 PM	Tube furnace set to 0
9/10/2011	9:07:55 PM	H2 valve closed
9/10/2011	9:07:55 PM	BCl3 valve closed
9/10/2011	9:07:55 PM	PH3 valve closed
9/10/2011	9:07:55 PM	SiCl4 pre valve closed
9/10/2011	9:07:55 PM	SiCl4 post valve closed
9/10/2011	9:07:55 PM	Bypass valve closed
9/10/2011	9:07:55 PM	Bubbler valve closed
9/10/2011	9:07:55 PM	Helium valve opened
9/10/2011	9:07:55 PM	Main Vac valve opened
9/10/2011	9:07:55 PM	Helium MFC set to  20.000000
9/10/2011	9:07:55 PM	H2 MFC set to  0.000000
9/10/2011	9:07:55 PM	BCl3 MFC set to  0.000000
9/10/2011	9:07:55 PM	PHl3 MFC set to  0.000000
9/10/2011	9:07:55 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:07:55 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	9:07:55 PM	Tube furnace set to 0
9/10/2011	9:08:25 PM	Helium valve closed
9/10/2011	9:08:25 PM	H2 valve closed
9/10/2011	9:08:25 PM	BCl3 valve closed
9/10/2011	9:08:25 PM	PH3 valve closed
9/10/2011	9:08:25 PM	SiCl4 pre valve closed
9/10/2011	9:08:25 PM	SiCl4 post valve closed
9/10/2011	9:08:25 PM	Bypass valve closed
9/10/2011	9:08:25 PM	Bubbler valve closed
9/10/2011	9:08:25 PM	Main Vac valve opened
9/10/2011	9:08:25 PM	Helium MFC set to  0.000000
9/10/2011	9:08:25 PM	H2 MFC set to  0.000000
9/10/2011	9:08:25 PM	BCl3 MFC set to  0.000000
9/10/2011	9:08:25 PM	PHl3 MFC set to  0.000000
9/10/2011	9:08:25 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:08:25 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	9:08:26 PM	Tube furnace set to 0
9/10/2011	9:08:56 PM	H2 valve closed
9/10/2011	9:08:56 PM	BCl3 valve closed
9/10/2011	9:08:56 PM	PH3 valve closed
9/10/2011	9:08:56 PM	SiCl4 pre valve closed
9/10/2011	9:08:56 PM	SiCl4 post valve closed
9/10/2011	9:08:56 PM	Bypass valve closed
9/10/2011	9:08:56 PM	Bubbler valve closed
9/10/2011	9:08:56 PM	Helium valve opened
9/10/2011	9:08:56 PM	Main Vac valve opened
9/10/2011	9:08:56 PM	Helium MFC set to  20.000000
9/10/2011	9:08:56 PM	H2 MFC set to  0.000000
9/10/2011	9:08:56 PM	BCl3 MFC set to  0.000000
9/10/2011	9:08:56 PM	PHl3 MFC set to  0.000000
9/10/2011	9:08:56 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:08:56 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	9:08:56 PM	Tube furnace set to 0
9/10/2011	9:09:26 PM	Helium valve closed
9/10/2011	9:09:26 PM	H2 valve closed
9/10/2011	9:09:26 PM	BCl3 valve closed
9/10/2011	9:09:26 PM	PH3 valve closed
9/10/2011	9:09:26 PM	SiCl4 pre valve closed
9/10/2011	9:09:26 PM	SiCl4 post valve closed
9/10/2011	9:09:26 PM	Bypass valve closed
9/10/2011	9:09:26 PM	Bubbler valve closed
9/10/2011	9:09:26 PM	Main Vac valve opened
9/10/2011	9:09:26 PM	Helium MFC set to  0.000000
9/10/2011	9:09:26 PM	H2 MFC set to  0.000000
9/10/2011	9:09:26 PM	BCl3 MFC set to  0.000000
9/10/2011	9:09:26 PM	PHl3 MFC set to  0.000000
9/10/2011	9:09:26 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:09:26 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	9:09:26 PM	Tube furnace set to 0
9/10/2011	9:09:56 PM	H2 valve closed
9/10/2011	9:09:56 PM	BCl3 valve closed
9/10/2011	9:09:56 PM	PH3 valve closed
9/10/2011	9:09:56 PM	SiCl4 pre valve closed
9/10/2011	9:09:56 PM	SiCl4 post valve closed
9/10/2011	9:09:56 PM	Bypass valve closed
9/10/2011	9:09:56 PM	Bubbler valve closed
9/10/2011	9:09:56 PM	Helium valve opened
9/10/2011	9:09:56 PM	Main Vac valve opened
9/10/2011	9:09:56 PM	Helium MFC set to  20.000000
9/10/2011	9:09:56 PM	H2 MFC set to  0.000000
9/10/2011	9:09:56 PM	BCl3 MFC set to  0.000000
9/10/2011	9:09:56 PM	PHl3 MFC set to  0.000000
9/10/2011	9:09:56 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:09:56 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	9:09:56 PM	Tube furnace set to 0
9/10/2011	9:10:26 PM	Helium valve closed
9/10/2011	9:10:26 PM	H2 valve closed
9/10/2011	9:10:26 PM	BCl3 valve closed
9/10/2011	9:10:26 PM	PH3 valve closed
9/10/2011	9:10:26 PM	SiCl4 pre valve closed
9/10/2011	9:10:26 PM	SiCl4 post valve closed
9/10/2011	9:10:26 PM	Bypass valve closed
9/10/2011	9:10:26 PM	Bubbler valve closed
9/10/2011	9:10:26 PM	Main Vac valve opened
9/10/2011	9:10:26 PM	Helium MFC set to  0.000000
9/10/2011	9:10:26 PM	H2 MFC set to  0.000000
9/10/2011	9:10:26 PM	BCl3 MFC set to  0.000000
9/10/2011	9:10:26 PM	PHl3 MFC set to  0.000000
9/10/2011	9:10:26 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:10:26 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	9:10:26 PM	Tube furnace set to 0
9/10/2011	9:10:56 PM	H2 valve closed
9/10/2011	9:10:56 PM	BCl3 valve closed
9/10/2011	9:10:56 PM	PH3 valve closed
9/10/2011	9:10:56 PM	SiCl4 pre valve closed
9/10/2011	9:10:56 PM	SiCl4 post valve closed
9/10/2011	9:10:56 PM	Bypass valve closed
9/10/2011	9:10:56 PM	Bubbler valve closed
9/10/2011	9:10:56 PM	Helium valve opened
9/10/2011	9:10:56 PM	Main Vac valve opened
9/10/2011	9:10:57 PM	Helium MFC set to  20.000000
9/10/2011	9:10:57 PM	H2 MFC set to  0.000000
9/10/2011	9:10:57 PM	BCl3 MFC set to  0.000000
9/10/2011	9:10:57 PM	PHl3 MFC set to  0.000000
9/10/2011	9:10:57 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:10:57 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	9:10:57 PM	Tube furnace set to 0
9/10/2011	9:11:14 PM	Run aborted at 9:11 PM
9/10/2011	9:11:14 PM	Helium valve closed
9/10/2011	9:11:14 PM	H2 valve closed
9/10/2011	9:11:14 PM	BCl3 valve closed
9/10/2011	9:11:14 PM	PH3 valve closed
9/10/2011	9:11:14 PM	SiCl4 pre valve closed
9/10/2011	9:11:14 PM	SiCl4 post valve closed
9/10/2011	9:11:14 PM	Bypass valve closed
9/10/2011	9:11:14 PM	Main Vac valve closed
9/10/2011	9:11:14 PM	Bubbler valve closed
9/10/2011	9:11:14 PM	Helium MFC set to  0.000000
9/10/2011	9:11:14 PM	H2 MFC set to  0.000000
9/10/2011	9:11:14 PM	BCl3 MFC set to  0.000000
9/10/2011	9:11:14 PM	PHl3 MFC set to  0.000000
9/10/2011	9:11:14 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:11:14 PM	Tube furnace set to 0
9/10/2011	9:11:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/10/2011	9:11:18 PM	Main Vac valve opened
9/10/2011	9:12:18 PM	Recipe started at 9:12 PM
9/10/2011	9:12:18 PM	Helium valve closed
9/10/2011	9:12:18 PM	H2 valve closed
9/10/2011	9:12:18 PM	BCl3 valve closed
9/10/2011	9:12:18 PM	PH3 valve closed
9/10/2011	9:12:18 PM	SiCl4 pre valve closed
9/10/2011	9:12:18 PM	SiCl4 post valve closed
9/10/2011	9:12:18 PM	Bypass valve closed
9/10/2011	9:12:18 PM	Bubbler valve closed
9/10/2011	9:12:18 PM	Main Vac valve opened
9/10/2011	9:12:18 PM	Helium MFC set to  0.000000
9/10/2011	9:12:18 PM	H2 MFC set to  0.000000
9/10/2011	9:12:18 PM	BCl3 MFC set to  0.000000
9/10/2011	9:12:18 PM	PHl3 MFC set to  0.000000
9/10/2011	9:12:18 PM	SiCl4 MFC set to  0.000000
9/10/2011	9:12:18 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	9:12:18 PM	Tube furnace set to 180
9/10/2011	10:12:19 PM	H2 valve closed
9/10/2011	10:12:19 PM	BCl3 valve closed
9/10/2011	10:12:19 PM	PH3 valve closed
9/10/2011	10:12:19 PM	SiCl4 pre valve closed
9/10/2011	10:12:19 PM	SiCl4 post valve closed
9/10/2011	10:12:19 PM	Bypass valve closed
9/10/2011	10:12:19 PM	Bubbler valve closed
9/10/2011	10:12:19 PM	Helium valve opened
9/10/2011	10:12:19 PM	Main Vac valve opened
9/10/2011	10:12:19 PM	Helium MFC set to  10.000000
9/10/2011	10:12:19 PM	H2 MFC set to  0.000000
9/10/2011	10:12:19 PM	BCl3 MFC set to  0.000000
9/10/2011	10:12:19 PM	PHl3 MFC set to  0.000000
9/10/2011	10:12:19 PM	SiCl4 MFC set to  0.000000
9/10/2011	10:12:19 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	10:12:19 PM	Tube furnace set to 180
9/10/2011	10:12:49 PM	Helium valve closed
9/10/2011	10:12:49 PM	H2 valve closed
9/10/2011	10:12:49 PM	BCl3 valve closed
9/10/2011	10:12:49 PM	PH3 valve closed
9/10/2011	10:12:49 PM	SiCl4 pre valve closed
9/10/2011	10:12:49 PM	SiCl4 post valve closed
9/10/2011	10:12:49 PM	Bypass valve closed
9/10/2011	10:12:49 PM	Bubbler valve closed
9/10/2011	10:12:49 PM	Main Vac valve opened
9/10/2011	10:12:49 PM	Helium MFC set to  0.000000
9/10/2011	10:12:49 PM	H2 MFC set to  0.000000
9/10/2011	10:12:49 PM	BCl3 MFC set to  0.000000
9/10/2011	10:12:49 PM	PHl3 MFC set to  0.000000
9/10/2011	10:12:49 PM	SiCl4 MFC set to  0.000000
9/10/2011	10:12:49 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	10:12:49 PM	Tube furnace set to 180
9/10/2011	10:13:19 PM	H2 valve closed
9/10/2011	10:13:19 PM	BCl3 valve closed
9/10/2011	10:13:19 PM	PH3 valve closed
9/10/2011	10:13:19 PM	SiCl4 pre valve closed
9/10/2011	10:13:19 PM	SiCl4 post valve closed
9/10/2011	10:13:19 PM	Bypass valve closed
9/10/2011	10:13:19 PM	Bubbler valve closed
9/10/2011	10:13:19 PM	Helium valve opened
9/10/2011	10:13:19 PM	Main Vac valve opened
9/10/2011	10:13:19 PM	Helium MFC set to  10.000000
9/10/2011	10:13:19 PM	H2 MFC set to  0.000000
9/10/2011	10:13:19 PM	BCl3 MFC set to  0.000000
9/10/2011	10:13:19 PM	PHl3 MFC set to  0.000000
9/10/2011	10:13:19 PM	SiCl4 MFC set to  0.000000
9/10/2011	10:13:19 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	10:13:19 PM	Tube furnace set to 180
9/10/2011	10:13:49 PM	Helium valve closed
9/10/2011	10:13:49 PM	H2 valve closed
9/10/2011	10:13:49 PM	BCl3 valve closed
9/10/2011	10:13:49 PM	PH3 valve closed
9/10/2011	10:13:49 PM	SiCl4 pre valve closed
9/10/2011	10:13:49 PM	SiCl4 post valve closed
9/10/2011	10:13:49 PM	Bypass valve closed
9/10/2011	10:13:49 PM	Bubbler valve closed
9/10/2011	10:13:49 PM	Main Vac valve opened
9/10/2011	10:13:49 PM	Helium MFC set to  0.000000
9/10/2011	10:13:49 PM	H2 MFC set to  0.000000
9/10/2011	10:13:49 PM	BCl3 MFC set to  0.000000
9/10/2011	10:13:49 PM	PHl3 MFC set to  0.000000
9/10/2011	10:13:49 PM	SiCl4 MFC set to  0.000000
9/10/2011	10:13:49 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	10:13:49 PM	Tube furnace set to 180
9/10/2011	10:15:49 PM	Helium valve closed
9/10/2011	10:15:49 PM	BCl3 valve closed
9/10/2011	10:15:49 PM	PH3 valve closed
9/10/2011	10:15:49 PM	SiCl4 pre valve closed
9/10/2011	10:15:49 PM	SiCl4 post valve closed
9/10/2011	10:15:49 PM	Main Vac valve closed
9/10/2011	10:15:49 PM	Bypass valve closed
9/10/2011	10:15:49 PM	Bubbler valve closed
9/10/2011	10:15:49 PM	H2 valve opened
9/10/2011	10:15:49 PM	Helium MFC set to  0.000000
9/10/2011	10:15:49 PM	H2 MFC set to  500.000000
9/10/2011	10:15:49 PM	BCl3 MFC set to  0.000000
9/10/2011	10:15:49 PM	PHl3 MFC set to  0.000000
9/10/2011	10:15:49 PM	SiCl4 MFC set to  0.000000
9/10/2011	10:15:49 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	10:15:49 PM	Tube furnace set to 1000
9/10/2011	10:16:53 PM	Helium valve closed
9/10/2011	10:16:53 PM	BCl3 valve closed
9/10/2011	10:16:53 PM	PH3 valve closed
9/10/2011	10:16:53 PM	SiCl4 pre valve closed
9/10/2011	10:16:53 PM	SiCl4 post valve closed
9/10/2011	10:16:53 PM	Main Vac valve closed
9/10/2011	10:16:53 PM	Bypass valve closed
9/10/2011	10:16:53 PM	H2 valve opened
9/10/2011	10:16:53 PM	Bubbler valve opened
9/10/2011	10:16:53 PM	Helium MFC set to  0.000000
9/10/2011	10:16:53 PM	H2 MFC set to  500.000000
9/10/2011	10:16:53 PM	BCl3 MFC set to  0.000000
9/10/2011	10:16:53 PM	PHl3 MFC set to  0.000000
9/10/2011	10:16:53 PM	SiCl4 MFC set to  0.000000
9/10/2011	10:16:53 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	10:16:53 PM	Tube furnace set to 1000
9/10/2011	10:16:54 PM	Helium valve closed
9/10/2011	10:16:54 PM	BCl3 valve closed
9/10/2011	10:16:54 PM	PH3 valve closed
9/10/2011	10:16:54 PM	SiCl4 pre valve closed
9/10/2011	10:16:54 PM	SiCl4 post valve closed
9/10/2011	10:16:54 PM	Main Vac valve closed
9/10/2011	10:16:54 PM	Bypass valve closed
9/10/2011	10:16:54 PM	H2 valve opened
9/10/2011	10:16:54 PM	Bubbler valve opened
9/10/2011	10:16:54 PM	Helium MFC set to  0.000000
9/10/2011	10:16:54 PM	H2 MFC set to  500.000000
9/10/2011	10:16:54 PM	BCl3 MFC set to  0.000000
9/10/2011	10:16:54 PM	PHl3 MFC set to  0.000000
9/10/2011	10:16:54 PM	SiCl4 MFC set to  0.000000
9/10/2011	10:16:54 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	10:16:54 PM	Tube furnace set to 1000
9/10/2011	10:36:54 PM	Helium valve closed
9/10/2011	10:36:54 PM	PH3 valve closed
9/10/2011	10:36:54 PM	Main Vac valve closed
9/10/2011	10:36:54 PM	Bypass valve closed
9/10/2011	10:36:54 PM	H2 valve opened
9/10/2011	10:36:54 PM	BCl3 valve opened
9/10/2011	10:36:54 PM	SiCl4 pre valve opened
9/10/2011	10:36:54 PM	SiCl4 post valve opened
9/10/2011	10:36:54 PM	Bubbler valve opened
9/10/2011	10:36:54 PM	Helium MFC set to  0.000000
9/10/2011	10:36:54 PM	H2 MFC set to  500.000000
9/10/2011	10:36:54 PM	BCl3 MFC set to  2.500000
9/10/2011	10:36:54 PM	PHl3 MFC set to  0.000000
9/10/2011	10:36:54 PM	SiCl4 MFC set to  50.000000
9/10/2011	10:36:54 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	10:36:55 PM	Tube furnace set to 1000
9/10/2011	10:48:54 PM	Helium valve closed
9/10/2011	10:48:54 PM	BCl3 valve closed
9/10/2011	10:48:54 PM	PH3 valve closed
9/10/2011	10:48:54 PM	SiCl4 pre valve closed
9/10/2011	10:48:55 PM	SiCl4 post valve closed
9/10/2011	10:48:55 PM	Main Vac valve closed
9/10/2011	10:48:55 PM	Bypass valve closed
9/10/2011	10:48:55 PM	H2 valve opened
9/10/2011	10:48:55 PM	Bubbler valve opened
9/10/2011	10:48:55 PM	Helium MFC set to  0.000000
9/10/2011	10:48:55 PM	H2 MFC set to  500.000000
9/10/2011	10:48:55 PM	BCl3 MFC set to  0.000000
9/10/2011	10:48:55 PM	PHl3 MFC set to  0.000000
9/10/2011	10:48:55 PM	SiCl4 MFC set to  0.000000
9/10/2011	10:48:55 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	10:48:55 PM	Tube furnace set to 750
9/10/2011	10:53:55 PM	H2 valve closed
9/10/2011	10:53:55 PM	BCl3 valve closed
9/10/2011	10:53:55 PM	PH3 valve closed
9/10/2011	10:53:55 PM	SiCl4 pre valve closed
9/10/2011	10:53:55 PM	SiCl4 post valve closed
9/10/2011	10:53:55 PM	Main Vac valve closed
9/10/2011	10:53:55 PM	Bypass valve closed
9/10/2011	10:53:55 PM	Helium valve opened
9/10/2011	10:53:55 PM	Bubbler valve opened
9/10/2011	10:53:55 PM	Helium MFC set to  500.000000
9/10/2011	10:53:55 PM	H2 MFC set to  0.000000
9/10/2011	10:53:55 PM	BCl3 MFC set to  0.000000
9/10/2011	10:53:55 PM	PHl3 MFC set to  0.000000
9/10/2011	10:53:55 PM	SiCl4 MFC set to  0.000000
9/10/2011	10:53:55 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	10:53:55 PM	Tube furnace set to 0
9/10/2011	11:13:55 PM	Helium valve closed
9/10/2011	11:13:55 PM	H2 valve closed
9/10/2011	11:13:55 PM	BCl3 valve closed
9/10/2011	11:13:55 PM	PH3 valve closed
9/10/2011	11:13:55 PM	SiCl4 pre valve closed
9/10/2011	11:13:55 PM	SiCl4 post valve closed
9/10/2011	11:13:55 PM	Main Vac valve closed
9/10/2011	11:13:55 PM	Bypass valve closed
9/10/2011	11:13:55 PM	Bubbler valve closed
9/10/2011	11:13:55 PM	Helium MFC set to  0.000000
9/10/2011	11:13:55 PM	H2 MFC set to  0.000000
9/10/2011	11:13:55 PM	BCl3 MFC set to  0.000000
9/10/2011	11:13:55 PM	PHl3 MFC set to  0.000000
9/10/2011	11:13:55 PM	SiCl4 MFC set to  0.000000
9/10/2011	11:13:55 PM	Bypass solenoid MFC set to  0.000000
9/10/2011	11:13:55 PM	Tube furnace set to 0
